Tuning fork gyroscope
First Claim
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1. A method for reducing errors in a tuning fork gyroscope comprising:
- determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass; and
applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.
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Abstract
A method for reducing errors in a tuning fork gyroscope includes determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass. The method further includes applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.
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Citations
27 Claims
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1. A method for reducing errors in a tuning fork gyroscope comprising:
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determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass; and
applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for reducing errors in a tuning fork gyroscope including first and second proof masses, a left upper sense plate disposed over the first proof mass, a right upper sense plate disposed over the second proof mass, a left lower sense plate disposed under the first proof mass and a right lower sense plate disposed under the second proof mass, the method comprising:
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measuring a first distance, gtl, between the left upper sense plate and the first proof mass, measuring a second distance, gtr, between the right upper sense plate and the second proof mass, measuring a third distance, gbl, between the left lower sense plate and the first proof mass, and measuring a fourth distance, gbr, between the right lower sense plate and the second proof mass; and
applying a first voltage, Vtl, to the left upper sense plate, a second voltage, Vtr, to the right upper sense plate, a third voltage, Vbl, to the left lower sense plate, and a fourth voltage, Vbr, to the lower right sense plate, wherein the ratio of Vtl and Vbl is a function of gtl and gbl and the ratio of Vtr and Vbr is a function of gtr and gbr. - View Dependent Claims (8, 9)
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10. A method for fabricating a tuning fork gyroscope with upper and lower sense plates, the method comprising:
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providing a silicon substrate;
etching the silicon substrate to provide at least one recess in the silicon substrate;
producing a structure layer having a predetermined thickness;
etching the structure layer to provide at least one proof mass;
applying a metal coating to the silicon substrate beneath a portion of each proof mass;
providing a glass substrate;
etching the glass substrate to provide at least one recess in the glass substrate;
depositing a multimetal layer to the at least one recess;
electrostatically bonding the silicon substrate to the glass substrate; and
etching the silicon substrate down to the structure layer. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification