X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING
First Claim
1. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:
- a) a sensing subassembly comprising;
i) a substantially planar frame parallel to said plane;
ii) a first mass disposed in said plane;
iii) a second mass disposed in said plane laterally to said first mass; and
iv) a linkage within said frame and connected to said frame, wherein said linkage is connected to said first mass and to said second mass and wherein said linkage constrains said first and second masses to move in opposite directions perpendicular to said plane;
b) an actuator for driving a first portion of said subassembly into oscillation at a drive frequency; and
c) a transducer for sensing motion of a second portion of said subassembly responsive to said angular velocity.
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Accused Products
Abstract
An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
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Citations
49 Claims
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1. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:
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a) a sensing subassembly comprising;
i) a substantially planar frame parallel to said plane;
ii) a first mass disposed in said plane;
iii) a second mass disposed in said plane laterally to said first mass; and
iv) a linkage within said frame and connected to said frame, wherein said linkage is connected to said first mass and to said second mass and wherein said linkage constrains said first and second masses to move in opposite directions perpendicular to said plane;
b) an actuator for driving a first portion of said subassembly into oscillation at a drive frequency; and
c) a transducer for sensing motion of a second portion of said subassembly responsive to said angular velocity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane, the dual-axis sensor comprising:
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A) a first subsensor for measuring the X component of angular velocity, the first subsensor comprising;
a) a first sensing subassembly comprising;
i) a substantially planar first frame parallel to said plane;
ii) a first mass disposed in said plane;
iii) a second mass disposed in said plane laterally to said first mass; and
iv) a first linkage within said frame and connected to said frame, wherein said linkage is connected to said first mass and to said second mass and wherein said first linkage constrains said first and second masses to move in opposite directions perpendicular to said plane;
b) a first actuator for driving a first portion of said first subassembly into oscillation at a drive frequency; and
c) a first transducer for sensing motion of a second portion of said first subassembly responsive to the X component of angular velocity; and
B) a second subsensor for measuring the Y component of angular velocity, the second subsensor comprising;
a) a second sensing subassembly comprising;
i) a substantially planar second frame parallel to said plane;
ii) a third mass disposed in said plane;
iii) a fourth mass disposed in said plane laterally to said third mass; and
iv) a second linkage within said second frame and connected to said second frame, wherein said linkage is connected to said third mass and to said fourth mass and wherein said second linkage constrains said third and fourth masses to move in opposite directions perpendicular to said plane;
b) a second actuator for driving a first portion of said second subassembly into oscillation at a drive frequency; and
c) a second transducer for sensing motion of a second portion of said second subassembly responsive to the Y component of angular velocity.
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46. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:
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a) a first sensing subassembly comprising;
i) a substantially planar first frame parallel to said plane;
ii) a first mass disposed in said plane;
iii) a second mass disposed in said plane laterally to said first mass; and
iv) a first linkage within said frame and connected to said frame, wherein said linkage is connected to said first mass and to said second mass and wherein said first linkage constrains said first and second masses to move in opposite directions perpendicular to said plane;
b) a first actuator for driving a first portion of said first subassembly into oscillation at a drive frequency;
c) a first transducer for sensing a first motion of a second portion of said first subassembly responsive to said angular velocity;
d) a second sensing subassembly comprising;
i) a substantially planar second frame parallel to said plane;
ii) a third mass disposed in said plane;
iii) a fourth mass disposed in said plane laterally to said third mass; and
iv) a second linkage within said second frame and connected to said second frame, wherein said linkage is connected to said third mass and to said fourth mass and wherein said second linkage constrains said third and fourth masses to move in opposite directions perpendicular to said plane, wherein said second linkage has substantially the same configuration and orientation as said first linkage, said third mass corresponding to said first mass and said fourth mass corresponding to said second mass;
e) a second actuator for driving a first portion of said second subassembly into oscillation at a drive frequency; and
f) a second transducer for sensing a second motion of a second portion of said second subassembly responsive to said angular velocity;
wherein signals from said first and second transducers are combined to distinguish said first and second motions responsive to said angular velocity from a motion not responsive to said angular velocity. - View Dependent Claims (47, 48, 49)
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Specification