Tunable thin film capacitor
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Abstract
It is an object of the invention to provide a variable capacitor constituted such that, even when an external control voltage is applied, a stable dielectric constant of the dielectric layer can be obtained. A variable capacitor constituted such that a dielectric layer whose dielectric constant is changed by the application of an external voltage is held between an upper electrode layer and a lower electrode layer, wherein a plurality of capacitance-producing regions a, b are connected to each other.
142 Citations
46 Claims
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1-30. -30. (canceled)
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31. A tunable thin film capacitor comprising:
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a support substrate;
a lower electrode layer provided on the support substrate;
a thin film dielectric layer which is provided on the lower electrode layer and whose dielectric constant is changed by application of a control voltage; and
an upper electrode layer provided on the thin film dielectric layer, wherein the thin film dielectric layer is held between the lower electrode layer and the upper electrode layer so as to form a plurality of capacitance-producing regions, and the respective capacitance-producing regions are spaced apart from each other. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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Specification