Actuator Device
First Claim
1. An actuator element comprising:
- a plate member;
a piezoelectric/electrostrictive body disposed in facing relation to said plate member; and
a beam disposed between said plate member and said piezoelectric/electrostrictive body and fixing said piezoelectric/electrostrictive body to said plate member;
said piezoelectric/electrostrictive body having a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of said piezoelectric/electrostrictive layer which faces said plate member, and a lower electrode formed on a surface of said piezoelectric/electrostrictive layer which is opposite to the surface thereof facing said plate member;
whereby when an electric field is applied to said upper electrode and said lower electrode, a portion of said piezoelectric/electrostrictive body is displaced toward or away from said plate member.
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Accused Products
Abstract
An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.
54 Citations
16 Claims
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1. An actuator element comprising:
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a plate member;
a piezoelectric/electrostrictive body disposed in facing relation to said plate member; and
a beam disposed between said plate member and said piezoelectric/electrostrictive body and fixing said piezoelectric/electrostrictive body to said plate member;
said piezoelectric/electrostrictive body having a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of said piezoelectric/electrostrictive layer which faces said plate member, and a lower electrode formed on a surface of said piezoelectric/electrostrictive layer which is opposite to the surface thereof facing said plate member;
whereby when an electric field is applied to said upper electrode and said lower electrode, a portion of said piezoelectric/electrostrictive body is displaced toward or away from said plate member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification