Method of defining forbidden pitches for a lithography exposure tool

• US 20050086629A1
• Filed: 10/17/2003
• Published: 04/21/2005
• Est. Priority Date: 10/17/2003
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Gau, Tsai-Sheng, Tien, Li-Chun, You, Jan-Wen, Chou, Yu-Jun, Chen, Li-Jui, Shu, King-Chang, Shin, Jaw-Jung, Chen, Chun-Kuang, Lin, Burn-Jeng, Chang, Mi-Chang
• Granted Patent: US 6,973,636 B2
• Time in Patent Office: Days
• US Class Current: 716/51
• CPC Class Codes: G03F 1/44 Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
• CPC Class Codes: G03F 7/70425 Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
• CPC Class Codes: G03F 7/70433 Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
• CPC Class Codes: G03F 7/705 Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
• CPC Class Codes: G03F 7/70641 Focus

Abstract

A method of identifying and defining forbidden pitches or forbidden pitch ranges for a lithographic exposure tool under a given set of exposure conditions is provided. In the method, a computer simulation is performed, and its results are compared to frequently used pitches to see if such frequently used pitches may yield depth-of-focus (DOF) values greater than the focus budget for the exposure tool. If so, a verification test is performed by using a test mask and actually exposing a surface with the same pattern pitches simulated. From this, actual DOF values are obtained and compared to the focus budget of the exposure tool. Any pitches having a DOF value greater than the focus budget are designated as forbidden pitches. This forbidden pitch information may be integrated into a design rule to restrict the use of such forbidden pitches under the given exposure conditions where they are likely to arise.

Claims

1. A method of identifying forbidden pitches for a lithographic exposure tool, comprising:

selecting a set of exposure conditions;

performing a simulation of an actual lithographic exposure process using a computer model, wherein the performing of the simulation comprises;

selecting a set of pattern pitches for a certain target critical dimension, and

running the computer model using the selected set of exposure conditions for at least some of the pattern pitches from the set of pattern pitches to obtain a corresponding set of depth-of-focus (DOF) values for each pitch ran;

determining whether the DOF values are greater than a focus budget of the exposure tool for a set of frequently used pitches;

if the DOF values are not greater than the focus budget of the exposure tool for the set of frequently used pitches, selecting a new set of exposure conditions and re-performing the simulation using the new set of exposure conditions;

if the DOF values are greater than the focus budget of the exposure tool for the set of frequently used pitches, performing a verification test comprising;

providing a test mask having formed therein at least one of the pattern pitches used in a last performed simulation,

exposing a wafer through the test mask using the exposure tool and using the set of exposure conditions of the last performed simulation, and

determining an actual DOF value for at least one of the exposed pattern pitches;

for at least some of the exposed pattern pitches, comparing the corresponding actual DOF value with the focus budget of the exposure tool; and

if the actual DOF value is not greater than the focus budget of the exposure tool, designating that actual DOF value'"'"'s corresponding pattern pitch as a forbidden pitch.

2. The method of claim 1, wherein the exposure tool refers to a certain make or model of exposure tool.

3. The method of claim 1, wherein the exposure tool is one particular exposure tool.

4. The method of claim 1, further comprising:

compiling a list of the designated forbidden pitches; and

updating a design rule with the list of forbidden pitches.

5. The method of claim 1, further comprising:

identifying groups of adjacent forbidden pitches, if any;

forming one or more forbidden pitch ranges based on the identified groups of adjacent forbidden pitches; and

integrating information regarding the forbidden pitch range(s) into a design rule such that the forbidden pitch range(s) may be restricted from use.

6. The method of claim 1, wherein the test mask has formed therein one of the pattern pitches used in the last performed simulation.

7. The method of claim 1, wherein the test mask has formed therein all of the pattern pitches used in the last performed simulation.

8. The method of claim 1, wherein the set of frequently used pitches consists of one pitch.

9. The method of claim 1, wherein the set of frequently used pitches comprises two or more pitches.

10. The method of claim 1, wherein the set of exposure conditions comprises a numerical aperture value.

11. The method of claim 1, wherein the set of exposure conditions comprises a sigma value.

12. The method of claim 1, wherein the set of exposure conditions comprises an illumination condition.

13. The method of claim 1, further comprising:

using information about the designated forbidden pitch(es) while drawing an integrated circuit layout in avoid implementing the designated forbidden pitch(es) into the integrated circuit layout.

14. The method of claim 1, further comprising:

implementing information about the designated forbidden pitch(es) into a software program; and

using the software program to search for the designated forbidden pitch(es) in an integrated circuit layout.

15. The method of claim 14, further comprising:

modifying the integrated circuit layout by;

eliminating designated forbidden pitch(es) found during the search from a pattern of the integrated circuit layout; and

replacing the eliminated forbidden pitch with an allowed pitch in the pattern.

16. A method of adding information about forbidden pitches for a lithography exposure tool to a design rule relating to fabrication of semiconductor devices, comprising:

selecting a set of exposure conditions;

performing a simulation of an actual lithographic exposure process using a computer model, wherein the performing of the simulation comprises;

selecting a set of pattern pitches for a certain target critical dimension, and

running the computer model using the selected set of exposure conditions for at least some of the pattern pitches from the set of pattern pitches to obtain a corresponding set of depth-of-focus (DOF) values for each pitch ran;

determining whether the DOF values are greater than a focus budget of the exposure tool for a set of frequently used pitches;

if the DOF values are not greater than the focus budget of the exposure tool for the set of frequently used pitches, selecting a new set of exposure conditions and re-performing the simulation using the new set of exposure conditions;

if the DOF values are greater than the focus budget of the exposure tool for the set of frequently used pitches, performing a verification test comprising;

providing a test mask having formed therein at least one of the pattern pitches used in a last performed simulation,

exposing a wafer through the test mask using the exposure tool and using the set of exposure conditions of the last performed simulation, and

determining an actual DOF value for at least one of the exposed pattern pitches;

for at least some of the exposed pattern pitches, comparing the corresponding actual DOF value with the focus budget of the exposure tool;

if the actual DOF value is not greater than the focus budget of the exposure tool, designating that actual DOF value'"'"'s corresponding pattern pitch as a forbidden pitch; and

adding information about the forbidden pitch(es) for the exposure tool to the design rule.

17. The method of claim 16, further comprising:

defining a forbidden pitch range based on the actual DOF values from the verification test performed, wherein the defining of the forbidden pitch range comprises;

identifying groups of adjacent forbidden pitches, if any, and

designating the forbidden pitch range, wherein the forbidden pitch range comprises one or more adjacent forbidden pitches; and

adding information regarding the defined forbidden pitch range into the design rule.

18. The method of claim 17, further comprising integrating the information regarding the defined forbidden pitch range into the design rule such that the defined forbidden pitch range may be restricted from use.

19. The method of claim 16, further comprising integrating the information regarding the forbidden pitch(es) into the design rule such that the forbidden pitch(es) may be restricted from use.

20. The method of claim 16, wherein the exposure tool refers to a certain make or model of exposure tool.

21. The method of claim 16, wherein the exposure tool is one particular exposure tool.

22. The method of claim 16, wherein the test mask has formed therein one of the pattern pitches used in the last performed simulation.

23. The method of claim 16, wherein the test mask has formed therein all of the pattern pitches used in the last performed simulation.

24. The method of claim 16, wherein the set of frequently used pitches consists of one pitch.

25. The method of claim 16, wherein the set of frequently used pitches comprises two or more pitches.

26. The method of claim 16, wherein the set of exposure conditions comprises a numerical aperture value, a sigma value, and/or an illumination condition.

27. A method of constraining a design rule relating to fabrication of semiconductor devices, comprising:

selecting a set of exposure conditions;

performing a simulation of an actual lithographic exposure process using a computer model, wherein the performing of the simulation comprises;

selecting a set of pattern pitches for a certain target critical dimension, and

running the computer model that simulates an exposure tool using the selected set of exposure conditions for at least some of the pattern pitches from the set of pattern pitches to obtain a corresponding set of depth-of-focus (DOF) values for each pitch ran;

determining whether the DOF values are greater than a focus budget of the exposure tool for a set of frequently used pitches;

if the DOF values are not greater than the focus budget of the exposure tool for the set of frequently used pitches, selecting a new set of exposure conditions and re-performing the simulation using the new set of exposure conditions;

if the DOF values are greater than the focus budget of the exposure tool for the set of frequently used pitches, performing a verification test comprising;

providing a test mask having formed therein at least one of the pattern pitches used in a last performed simulation,

exposing a wafer through the test mask using the exposure tool and using the set of exposure conditions of the last performed simulation, and

determining an actual DOF value for at least one of the exposed pattern pitches;

defining one or more forbidden pitch ranges based on the actual DOF values from the verification test performed, wherein the defining of each forbidden pitch range comprises;

for at least some of the exposed pattern pitches, comparing the corresponding actual DOF value with the focus budget of the exposure tool,

if the actual DOF value is not greater than the focus budget of the exposure tool, designating that actual DOF value'"'"'s corresponding pattern pitch as a forbidden pitch,

identifying groups of adjacent forbidden pitches, if any, and

forming the forbidden pitch range based on the identified groups of adjacent forbidden pitches; and

integrating information regarding the defined forbidden pitch range(s) into the design rule such that the defined forbidden pitch range(s) may be restricted from use.

28. The method of claim 27, wherein the exposure tool refers to a certain make or model of exposure tool.

29. The method of claim 27, wherein the exposure tool is one particular exposure tool.