Fluid feeding apparatus

• US 20050087135A1
• Filed: 10/06/2004
• Published: 04/28/2005
• Est. Priority Date: 10/08/2003
• Status: Active Grant

• Current Assignee: Adeka Corporation
• Original Assignee: Adeka Corporation, Adeka Engineering & Construction Co. Ltd. (Adeka Corporation)
• Inventors: Nakagawa, Satoshi, Yajima, Akimasa, Hioki, Akira
• Granted Patent: US 7,237,565 B2
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: B08B 9/0321 using pressurised, pulsating or purging fluid E04F17/126 takes precedence
• CPC Class Codes: B08B 9/08 Cleaning containers, e.g. tanks
• CPC Class Codes: C23C 16/18 from metallo-organic compounds
• CPC Class Codes: C23C 16/4402 Reduction of impurities in the source gas
• CPC Class Codes: Y10T 137/4259 With separate material addition

Abstract

A fluid feeding apparatus capable of excluding the outer environmental influences in feeding a fluid susceptible to contamination, decomposition or denaturation on contact with the outer environment. The includes comprises at least one liquid source container, a cleaning and/or diluting liquid container, a waste liquid collection container, an inert gas feed pipe A, an inert gas feed pipe B, an evacuation pipe connecting to a vacuum source, and a fluid feed pipe for introducing the fluid to a process. The source container has two pipes. The first pipe has valves arranged therein at positions nearer to and farther from the source container, respectively. The second pipe has two valves arranged therein at positions nearer to and farther from the container, respectively. The path between the valves 1 and 4 and the path between the valves 2 and 5 are connected via a connecting pipe C having a valve 3.

Claims

1. An apparatus for feeding a fluid to a process comprising at least one source container for a source that is a fluid or capable of generating a fluid, at least one cleaning and/or diluting liquid container for a liquid for cleaning the inside of the fluid feeding apparatus and/or diluting the source, at least one collection container for collecting the cleaning liquid used for cleaning, at least one inert gas feed pipe A, at least one inert gas feed pipe B, at least one evacuation pipe connecting to a vacuum source, and at least one fluid feed pipe for delivering the fluid to the process,

the source container having container pipes C-1 and C-2 both led into the inside thereof, the container pipe C-1 having a valve 1 and a valve 4 arranged therein at positions nearer to and farther from the source container, respectively, the container pipe C-2 having a valve 2 and a valve 5 arranged therein at positions nearer to and farther from the source container, respectively, the path between the valves 1 and 4 and the path between the valves 2 and 5 being connected via a connecting pipe C having a valve 3;

the cleaning and/or diluting liquid container having container pipes S-1 and S-2 both led into the inside thereof, the container pipe S-1 having a valve 12, the container pipe S-2 having a valve 13, the container pipes S-1 and S-2 being connected at positions farther from the cleaning and/or diluting liquid container than the valves 12 and 13, respectively, via a connecting pipe S having a valve 14;

the collection container having container pipes W-1 and W-2 both led into the inside thereof, the container pipe W-1 having a valve 17, the container pipe W-2 having a valve 18, the container pipes W-1 and W-2 being connected at positions farther from the collection container than the valves 17 and 18, respectively, via a connecting pipe W having a valve 19;

the inert gas feed pipe A having a valve 15 and being connected to the container pipe S-1 via a joint S-1;

the evacuation pipe having a valve 21 and being connected to the container pipe W-2 via a joint W-2;

the inert gas feed pipe B being connected to the valve 4 via a joint C-1 and having valves 6 and 9 arranged therein at positions nearer to and farther from the joint C-1, respectively;

the fluid feed pipe being connected to the valve 5 via a joint C-2 and having valves 7 and 10 arranged therein at positions nearer to and farther from the joint C-2, respectively;

the valve 13 and the valve 17 being connected via a joint S-2 nearer to the container pipe S-2, through an S-W line, and via a joint W-1 nearer to the container pipe W-1 in this order, the S-W line having valves 16, 22, and 20 arranged therein in the order of from the nearest to the farthest from the joint S-2;

the path between the valves 16 and 22 being connected to the path between the valves 6 and 9 via a connecting pipe C-S having a valve 8; and

the path between the valves 22 and 20 being connected to the path between the valves 10 and 7 via a connecting pipe C-W having a valve 11.

2. An apparatus for feeding a fluid to a process comprising a first source container for a first source that is a fluid or capable of generating a fluid, a second source container for a second source that is a fluid or capable of generating a fluid, a cleaning and/or diluting liquid container for a liquid for cleaning the inside of the fluid feeding apparatus and/or diluting at least one of the first and the second sources, a collection container for collecting the cleaning liquid used for cleaning, an inert gas feed pipe A, an inert gas feed pipe B, an inert gas feed pipe B′

, an evacuation pipe connecting to a vacuum source, a first fluid feed pipe for delivering the fluid of the first source to the process, and a second fluid feed pipe for delivering the fluid of the second source to the process,

the first source container having container pipes C-1 and C-2 both led into the inside thereof, the container pipe C-1 having a valve 1 and a valve 4 arranged therein at positions nearer to and farther from the first source container, respectively, the container pipe C-2 having a valve 2 and a valve 5 arranged therein at positions nearer to and farther from the first source container, respectively, the path between the valves 1 and 4 and the path between the valves 2 and 5 being connected via a connecting pipe C having a valve 3;

the second source container having container pipes C′

-1 and C′

-2 both led into the inside thereof, the container pipe C′

-1 having a valve 1′ and

a valve 4′

arranged therein at positions nearer to and farther from the second source container, respectively, the container pipe C′

-2 having a valve 2′ and

a valve 5′

arranged therein at positions nearer to and farther from the second source container, respectively, the path between the valves 1′ and

4′ and

the path between the valves 2′ and

5′

being connected via a connecting pipe C′

having a valve 3′

;

the cleaning and/or diluting liquid container having container pipes S-1 and S-2 both led into the inside thereof, the container pipe S-1 having a valve 12, the container pipe S-2 having a valve 13, the container pipes S-1 and S-2 being connected at positions farther from the cleaning and/or diluting liquid container than the valves 12 and 13, respectively, via a connecting pipe S having a valve 14;

the collection container having container pipes W-1 and W-2 both led into the inside thereof, the container pipe W-1 having a valve 17, the container pipe W-2 having a valve 18, the container pipes W-1 and W-2 being connected at positions farther from the collection container than the valves 17 and 18, respectively, via a connecting pipe W having a valve 19;

the inert gas feed pipe A having a valve 15 and being connected to the container pipe S-1 via a joint S-1;

the evacuation pipe having a valve 21 and being connected to the container pipe W-2 via a joint W-2;

the inert gas feed pipe B being connected to the valve 4 via a joint C-1 and having valves 6 and 9 arranged therein at positions nearer to and farther from the joint C-1, respectively;

the inert gas feed pipe B′

being connected to the valve 4′

via a joint C′

-1 and having valves 6′ and

9′

arranged therein at positions nearer to and farther from the joint C′

-1, respectively;

the first fluid feed pipe being connected to the valve 5 via a joint C-2 and having valves 7 and 10 arranged therein at positions nearer to and farther from the joint C-2, respectively;

the second fluid feed pipe being connected to the valve 5′

via a joint C′

-2 and having valves 7′ and

10′

arranged therein at positions nearer to and farther from the joint C′

-2, respectively;

the valve 13 and the valve 17 being connected via a joint S-2 nearer to the container pipe S-2, an S-W line, and a joint W-1 nearer to the container pipe W-1 in this order, the S-W line having valves 16, 22, and 20 arranged therein in the order of from the nearest to the farthest from the joint S-2;

the path between the valves 16 and 22 being connected to the path between the valves 6 and 9 via a connecting pipe C-S having a valve 8;

the path between the valves 16 and 22 being connected to the path between the valves 9′ and

6′

via a connecting pipe C′

-S having a valve 8′

;

the path between the valves 22 and 20 being connected to the path between the valves 10 and 7 via a connecting pipe C-W having a valve 11; and

the path between the valves 22 and 20 being connected to the path between the values 10′ and

7′

via a connecting pipe C′

-W having a valve 11′

.