Compositions and methods involving direct write optical lithography
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Abstract
An improved optical photolithography system and method provides predetermined light patterns generated by a direct write system without the use of photomasks. The Direct Write System provides predetermined light patterns projected on the surface of a substrate (e.g., a wafer) by using a computer controlled means for dynamically generating the predetermined light pattern, e.g., a spatial light modulator. Image patterns are stored in a computer and through electronic control of the spatial light modulator directly illuminate the wafer to define a portion of the polymer array, rather than being defined by a pattern on a photomask. Thus, in the Direct Write System each pixel is illuminated with an optical beam of suitable intensity and the imaging (printing) of an individual feature is determined by computer control of the spatial light modulator at each photolithographic step without the use of a photomask. The Direct Write System including a spatial light modulator is particularly useful in the synthesis of DNA arrays and provides an efficient means for polymer array synthesis by using spatial light modulators to generate a predetermined light pattern that defines the image patterns of a polymer array to be deprotected.
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Citations
142 Claims
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1-112. -112. (canceled)
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113. A method of attaching monomers at specific reaction sites on a substrate, said specific reaction sites containing one or more non-photolabile protected initiating moieties, the method comprising:
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a) contacting said substrate with a liquid solution comprising one or more photo-reagent precursors, said precursors selected from the group consisting of acid and base precursors, such that said liquid solution is in contact with said initiating moieties;
b) isolating said specific reaction sites;
c) irradiating a selected number of the isolated reaction sites to produce, in situ, at least one photo-generated reagent without the formation of a polymeric coating layer, thereby directly deprotecting the initiating moieties at the irradiated reaction sites so as to create deprotected initiating moieties; and
d) contacting said substrate with a first monomer, said first monomer comprising an unprotected reactive site and a protected reactive site, under conditions such that said unprotected reactive site of said monomer couples with said deprotected initiating moieties so as to create an attached first monomer. - View Dependent Claims (114, 115, 116, 117, 118, 119, 120, 121)
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122. The method of claim 1113, wherein said initiating moieties of step (a) comprise oligomers to which a monomer can be attached.
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123. An apparatus for generating a time and spatially dependent light spectrum comprising:
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(a) a light source positioned to direct a light output, wherein said light source comprises a light that is redirected by a micromirror array under the control of a computer to produce said light output;
(b) a variable spectrum filter placed in the path of the light redirected by said light source, wherein said variable spectrum filter passes one or more spatially separated wavelengths of light; and
(c) said a computer controls the relative position of said variable spectrum filter and said light output. - View Dependent Claims (124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136)
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137. An apparatus for projecting one or more wavelengths of light comprising:
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(a) a light source positioned to redirect light from said light source toward a target, wherein said light source is further defined as comprising a light that produces one or more wavelengths of light that are redirected by a micromirror array under the control of a computer to produce said light;
(b) a variable spectrum generator positioned to pass one or more spatially separated wavelengths of light from said light source; and
(c) said computer connected to, and controlling, said light source and said variable spectrum generator to pass one or more wavelengths of light from said light source toward said target. - View Dependent Claims (138, 139, 140, 141, 142)
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Specification