Micro-Mirror device including dielectrophoretic liquid
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Abstract
A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic liquid capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position. The dielectrophoretic liquid includes at least one compound selected from the group consisting of siloxanes and silanes substantially free of asymmetrical ether linkages.
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Citations
36 Claims
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1-15. -15. (canceled)
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16. A micro-actuator, comprising:
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a substrate having a surface;
a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
a dielectrophoretic liquid disposed in the cavity and capable of movement when an electrical signal is applied to the micro-actuator, the dielectrophoretic liquid including at least one compound selected from the group consisting of siloxanes substantially free of asymmetrical ether linkages and silanes substantially free of asymmetrical ether linkages; and
an actuating element interposed between the surface of the substrate and the plate, wherein the actuating element is adapted to move between a first position and at least one second position. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method of using a dielectrophoretic liquid in a micro-actuator including an actuator element adapted to move between a first position and at least one second position, the method comprising:
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disposing the dielectrophoretic liquid in a cavity of the micro-actuator, including at least one of positioning the actuator element above and submerging the actuator element in the dielectrophoretic liquid; and
moving the actuator element between the first position and the least one second position, including applying an electrical signal to the micro-actuator, wherein the dielectrophoretic liquid includes at least one compound selected from the group consisting of siloxanes substantially free of asymmetrical ether linkages and silanes substantially free of asymmetrical ether linkages, and wherein the dielectrophoretic liquid exhibits movement when the electrical signal is applied to the micro-actuator and the movement contributes to the moving of the actuator element between the first position and the at least one second position. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification