Sunken electrode configuration for MEMs micromirror
First Claim
1. A micro-electro-mechanical device mounted on a substrate comprising:
- a pivoting member pivotally mounted on said substrate about a first axis;
a first hot electrode beneath the pivoting member for pivoting the pivoting member about the first axis;
a first ground electrode adjacent to the first hot electrode separated by a step creating a vertical gap therebetween; and
a dielectric material in the gap for isolating the first hot electrode from the first ground electrode.
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Accused Products
Abstract
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror'"'"'s angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
18 Citations
20 Claims
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1. A micro-electro-mechanical device mounted on a substrate comprising:
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a pivoting member pivotally mounted on said substrate about a first axis;
a first hot electrode beneath the pivoting member for pivoting the pivoting member about the first axis;
a first ground electrode adjacent to the first hot electrode separated by a step creating a vertical gap therebetween; and
a dielectric material in the gap for isolating the first hot electrode from the first ground electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A micro-electro-mechanical device mounted on a substrate comprising:
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an array of pivoting members pivotally mounted on said substrate about a first axis;
a first hot electrode beneath each pivoting member for pivoting respective pivoting members about the first axis; and
a first ground electrode adjacent to each first hot electrode separated by a substantially vertical surface;
wherein the vertical surfaces comprises a dielectric surface for isolating the first hot electrodes from the first ground electrodes. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification