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Method and apparatus for fluid processing a workpiece

  • US 20050089645A1
  • Filed: 10/22/2004
  • Published: 04/28/2005
  • Est. Priority Date: 10/22/2003
  • Status: Active Grant
First Claim
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1. An apparatus for fluid sealing a workpiece, comprising:

  • a member defining at least one retaining feature; and

    a ring comprising at least one engagement feature engageable with the at least one retaining feature of the member;

    wherein the member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

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