Method and apparatus for fluid processing a workpiece
First Claim
1. An apparatus for fluid sealing a workpiece, comprising:
- a member defining at least one retaining feature; and
a ring comprising at least one engagement feature engageable with the at least one retaining feature of the member;
wherein the member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
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Accused Products
Abstract
A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.
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Citations
55 Claims
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1. An apparatus for fluid sealing a workpiece, comprising:
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a member defining at least one retaining feature; and
a ring comprising at least one engagement feature engageable with the at least one retaining feature of the member;
wherein the member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of fluid sealing a workpiece, comprising:
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placing a workpiece on a ring;
engaging at least one engagement feature of the ring with at least one retaining feature defined by a member; and
flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. An apparatus for applying force to an object, comprising:
a substantially planar, ring-shaped member defining a plurality of flex features positioned about a perimeter of the member, the plurality of flex features providing a force at least substantially uniformly around the perimeter of the object when the member is flexed. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A method for applying a uniform force to an object, comprising:
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providing a member having a substantially planar, ring shape;
providing a plurality of flex features positioned about a perimeter of the member; and
flexing the member to provide a force from the plurality of flex features at least substantially uniformly around the perimeter of an object. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53)
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54. An apparatus for fluid sealing a workpiece, comprising:
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a first means defining at least one retaining feature;
a ring comprising at least one engagement means engageable with the at least one retaining feature; and
a second means for flexing the first means to provide a force to the at least one engagement means to cause the ring to form a barrier to fluid entry with the workpiece.
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55. An apparatus for applying force to an object, comprising:
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a substantially planar ring-shaped member defining a plurality of flex features positioned about a perimeter of the member; and
a means for flexing the member to provide a force from the plurality of flex features at least substantially uniformly around the perimeter of an object.
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Specification