Method and apparatus for fluid processing a workpiece

• US 20050089645A1
• Filed: 10/22/2004
• Published: 04/28/2005
• Est. Priority Date: 10/22/2003
• Status: Active Grant

• Current Assignee: Asmpt NEXX Incorporated
• Original Assignee: NEXX Systems, Inc.
• Inventors: Keigler, Arthur, Liu, Zhenqiu, Harrell, John, Wu, Qunwei
• Granted Patent: US 7,722,747 B2
• Time in Patent Office: Days
• US Class Current: 427/443.100
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/005 Contacting devices
• CPC Class Codes: C25D 17/06 Suspending or supporting devices for articles to be coated
• CPC Class Codes: C25D 21/10 Agitating of electrolytes; Moving of racks
• CPC Class Codes: C25D 21/12 Process control or regulation controlling or regulating in general G05
• CPC Class Codes: C25D 5/003 Electroplating using gases, e.g. pressure influence
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer
• CPC Class Codes: H01L 21/67023 for general liquid treatment, e.g. etching followed by cleaning
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.

Claims

1. An apparatus for fluid sealing a workpiece, comprising:

a member defining at least one retaining feature; and

a ring comprising at least one engagement feature engageable with the at least one retaining feature of the member;

wherein the member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

2. The apparatus of claim 1 wherein the force causes the member to pull the at least one engagement feature of the ring to cause the ring-to push against the workpiece to form the barrier to fluid entry.

3. The apparatus of claim 1 wherein the member comprises at least one flex feature adapted to provide the force substantially normal to the plane of the member to form the barrier to fluid entry.

4. The apparatus of claim 1 wherein the member defines a plurality of flex features positioned about a perimeter of the member to provide the force at least substantially uniformly from the perimeter of the member.

5. The apparatus of claim 1 further comprising a backing member adapted to apply a force to flex the member.

6. The apparatus of claim 5 wherein the backing member comprises push pins to contact the member.

7. The apparatus of claim 5 further comprising an inflatable bladder adjacent the backing member for moving the backing member to apply the force to flex the member.

8. The apparatus of claim 1 further comprising a workpiece holder to which the member and the ring are removably attached.

9. The apparatus of claim 8 wherein the member comprises at least one tab section for engaging at least one tooth feature of the workpiece holder.

10. The apparatus of claim 1 wherein the ring comprises a first elastomer region for forming the barrier to fluid entry with a surface of the workpiece.

11. The apparatus of claim 8 wherein the ring comprises a second elastomer region for forming a second barrier to fluid entry with a surface of the workpiece holder.

12. The apparatus of claim 1 wherein the ring comprises at least one contact adapted to form an electrical connection with the workpiece.

13. The apparatus of claim 1 wherein the workpiece has a substantially non-circular shape.

14. The apparatus of claim 8 wherein the workpiece holder defines a hole that passes from a first surface to a second surface, the diameter being smaller than the diameter of the ring, the hole for processing a plurality of surfaces of the workpiece.

15. A method of fluid sealing a workpiece, comprising:

placing a workpiece on a ring;

engaging at least one engagement feature of the ring with at least one retaining feature defined by a member; and

flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

16. The method of claim 15 wherein the force causes the member to pull the at least one engagement feature of the ring to cause the ring to push against the workpiece to form the barrier to fluid entry.

17. The method of claim 15 further comprising providing the force at least substantially uniformly from a perimeter of the member via a plurality of flex features positioned about the perimeter.

18. The method of claim 15 further comprising rotating the ring to lock the at least one engagement feature of the ring into the at least one retaining feature of the member.

19. The method of claim 15 further comprising applying the force substantially normal to the plane of the member using at least one flex feature of the member.

20. The method of claim 15 further comprising moving a backing member to flex the member.

21. The method of claim 20 further comprising deflating a bladder to move the backing member away from the member.

22. The method of claim 15 further comprising testing the integrity of the barrier to fluid entry.

23. The method of claim 15 wherein the member includes an over-extended state in which the at least one retaining feature captures the at least one engagement feature of the ring prior to flexing the member.

24. The method of claim 15 further comprising depositing a metal or a plastic on a surface of the workpiece.

25. The method of claim 15 further comprising dissoluting a metal or a plastic on a surface of the workpiece.

26. The method of claim 15 further comprising processing a plurality of surfaces of the workpiece via a hole defined by the workpiece holder, the hole passing from a first surface of a workpiece holder to a second surface of the workpiece holder, the diameter of the hole being smaller than the diameter of the ring.

27. An apparatus for applying force to an object, comprising:

a substantially planar, ring-shaped member defining a plurality of flex features positioned about a perimeter of the member, the plurality of flex features providing a force at least substantially uniformly around the perimeter of the object when the member is flexed.

28. The apparatus of claim 27 wherein the force is provided substantially normal to the plane of the member.

29. The apparatus of claim 27 wherein the member defines at least one retaining feature engageable with at least one engagement feature of a ring.

30. The apparatus of claim 29 wherein the ring retains the object while the force is applied.

31. The apparatus of claim 27 wherein the object has a substantially non-circular shape.

32. The apparatus of claim 27 further comprising a backing member adapted to apply a force to flex the member.

33. The apparatus of claim 32 wherein the backing member comprises push pins to contact the member.

34. The apparatus of claim 31 further comprising an inflatable bladder adjacent the backing member for moving the backing member to apply the force to flex the member.

35. The apparatus of claim 29 further comprising a workpiece holder to which the member and the ring are removably attached.

36. The apparatus of claim 35 wherein the member comprises at least one tab section for engaging at least one tooth feature of the workpiece holder.

37. The apparatus of claim 27 wherein the force retains the object against a portion of a surface of a workpiece holder.

38. The apparatus of claim 27 wherein the plurality of flex features are positioned about an inner perimeter of the member.

39. The apparatus of claim 27 wherein the plurality of flex features are positioned about an outer perimeter of the member.

40. The apparatus of claim 27 wherein the plurality of flex features are positioned about both the inner and outer perimeters of the member.

41. The apparatus of claim 27 wherein the member comprises a spring-like material.

42. The apparatus of claim 27 wherein the member comprises stainless steel or titanium.

43. The apparatus of claim 35 wherein the workpiece holder defines a hole that passes from a first surface to a second surface of the workpiece holder, the diameter being smaller than the diameter of the ring, the hole for processing a plurality of surfaces of the object.

44. A method for applying a uniform force to an object, comprising:

providing a member having a substantially planar, ring shape;

providing a plurality of flex features positioned about a perimeter of the member; and

flexing the member to provide a force from the plurality of flex features at least substantially uniformly around the perimeter of an object.

45. The method of claim 44 further comprising providing the force substantially normal to the plane of the member.

46. The method of claim 44 further comprising retaining the object with a ring while the force is applied.

47. The method of claim 48 further comprising rotating the ring to lock at least one engagement feature of the ring into at least one retaining feature defined by the member.

48. The method of claim 44 wherein the object has a substantially non-circular shape.

49. The method of claim 46 further comprising retaining the object against a portion of a surface of a workpiece holder.

50. The method of claim 44 wherein the plurality of flex features are positioned about an inner perimeter of the member.

51. The method of claim 44 wherein the plurality of flex features are positioned about an outer perimeter of the member.

52. The method of claim 44 wherein the plurality of flex features are positioned about both the inner and outer perimeters of the member.

53. The method of claim 49 further comprising processing a plurality of surfaces of the object via a hole defined by the workpiece holder, the hole passing from a first surface to a second surface of the workpiece holder, the diameter of the hole being smaller than the diameter of the ring.

54. An apparatus for fluid sealing a workpiece, comprising:

a first means defining at least one retaining feature;

a ring comprising at least one engagement means engageable with the at least one retaining feature; and

a second means for flexing the first means to provide a force to the at least one engagement means to cause the ring to form a barrier to fluid entry with the workpiece.

55. An apparatus for applying force to an object, comprising:

a substantially planar ring-shaped member defining a plurality of flex features positioned about a perimeter of the member; and

a means for flexing the member to provide a force from the plurality of flex features at least substantially uniformly around the perimeter of an object.