METHOD TO CONTROL THE RELATIVE POSITION BETWEEN A BODY AND A SURFACE
First Claim
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1. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:
- sensing said relative position between said surface and said body; and
moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions.
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Abstract
A method to control a relative position between a surface and a body to form a pattern in the surface that features moving a body to obtain a desired relationship between the surface and the body. To that end, the method includes sensing the surface and the body and moving that body to obtain a desired spatial relationship with the surface.
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Citations
21 Claims
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1. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:
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sensing said relative position between said surface and said body; and
moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:
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sensing said relative position between said surface and said body;
moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions; and
after moving said body to obtain said desired spatial relationship, contacting said surface with said body. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:
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sensing said relative position between said surface and said body by detecting a fringe pattern produced by light impinging upon said body and said surface; and
moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions. - View Dependent Claims (18, 19, 20, 21)
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Specification