Method of maintaining and automatically inspecting processing apparatus
First Claim
1. A method of maintaining a processing apparatus, comprising:
- a registration step in which unit operations corresponding to each part of said processing apparatus undergoing maintenance are registered in advance;
a macro writing step in which a maintenance macro is configured for executing said unit operations as at least one of in units of the individual operations and a combination of unit operations the combination of unit operations being executed through at least one of a sequence operation and a parallel operation; and
a macro execution step in which maintenance is performed by executing said maintenance macro.
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Accused Products
Abstract
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S110). If it is judged through the diagnosis performed in S110 that no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S130). If the processing has been completed, the processing apparatus is stopped (S140). If, on the other hand, it is judged through the diagnosis performed in S110 that an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S120). The processing apparatus is then stopped (S140).
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Citations
12 Claims
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1. A method of maintaining a processing apparatus, comprising:
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a registration step in which unit operations corresponding to each part of said processing apparatus undergoing maintenance are registered in advance;
a macro writing step in which a maintenance macro is configured for executing said unit operations as at least one of in units of the individual operations and a combination of unit operations the combination of unit operations being executed through at least one of a sequence operation and a parallel operation; and
a macro execution step in which maintenance is performed by executing said maintenance macro. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of automatically inspecting a processing apparatus that processes a workpiece, comprising:
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a registration step in which at least inspection items to be checked in an inspection process and a time point for the inspection process are registered in advance;
a verification step in which the operating state of said processing apparatus is verified when the registered inspection time point arrives;
an inspection step in which the inspection process to check the registered inspection items is automatically and immediately executed if said processing apparatus is determined not to be engaged in operations or after the operation in said verification step of said processing apparatus ends, if said processing apparatus is determined to be engaged in operation in said verification step; and
a decision-making step in which a decision is made as to whether or not the inspection process has been completed. - View Dependent Claims (8, 9, 10, 11)
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12-18. -18. (canceled)
Specification