Method of determining the irregularities of a hole
First Claim
1. A method of determining irregularities of an actual hole having an irregular circumference, comprising:
- obtaining an area of the actual hole having the irregular circumference;
determining a radius and a center of a virtual hole that has a regular circumference, based on the area of the actual hole; and
obtaining the irregularities of the actual hole by determining a standard deviation of the circumference of the actual hole relative to the radius of the virtual hole.
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Accused Products
Abstract
In a method of calculating irregularities of a hole, a center coordinate of an actual hole is set. Inner wall coordinates of the actual hole are obtained from the center coordinate of the actual hole. An area of the actual hole is determined based on the inner wall coordinates of the actual hole. A radius of a virtual hole is determined based on the area of the actual hole. A center coordinate of the virtual hole is determined based on the inner wall coordinates of the actual hole to obtain a circumference line of the virtual hole. A standard deviation of the inner wall coordinates of the actual hole relative to the circumference line of the virtual hole is calculated, thereby obtaining the irregularities of the actual hole.
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Citations
16 Claims
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1. A method of determining irregularities of an actual hole having an irregular circumference, comprising:
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obtaining an area of the actual hole having the irregular circumference;
determining a radius and a center of a virtual hole that has a regular circumference, based on the area of the actual hole; and
obtaining the irregularities of the actual hole by determining a standard deviation of the circumference of the actual hole relative to the radius of the virtual hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of determining irregularities of an actual hole having an irregular circumference located in a semiconductor device, comprising:
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obtaining an area of the actual hole in said semiconductor device having the irregular circumference;
determining a radius and a center of a virtual hole that has a regular circumference, based on the area of the actual hole in said semiconductor device; and
obtaining the irregularities of the actual hole in said semiconductor device by determining a standard deviation of the circumference of the actual hole relative to the radius of the virtual hole. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method of determining irregularities of a hole comprising:
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setting a center coordinate (xc′
,yc′
) of a actual hole;
obtaining n inner wall coordinates (x1,y1), (x2,y2), (x3,y3), . . . , (xi,yi), . . . , (xn,yn), wherein n is a positive integer, of the actual hole from the center coordinate of the actual hole;
drawing lines from the center coordinate of the actual hole to the inner wall coordinates of the actual hole to divide the actual hole into triangles, the lines having substantially equal angles between thereof;
summing an area of each of the triangles to obtain an area of the actual hole;
determining a radius r of a virtual hole based on the area of the actual hole;
obtaining a center coordinate (xc,yc) of the virtual hole by summing the inner wall coordinates of the actual hole and then dividing the summed inner wall coordinates by n;
determining distances li between the center coordinate of the virtual hole and the inner wall coordinates of the actual hole; and
obtaining the irregularities of the actual hole by determining a standard deviation σ
of the distances relative to the radius of the virtual hole using following equation;
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Specification