Semiconductor device and manufacturing method thereof

• US 20050093090A1
• Filed: 09/15/2004
• Published: 05/05/2005
• Est. Priority Date: 09/19/2003
• Status: Abandoned Application

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Shindo, Tomoyuki
• Application Number:
  US10/940,991
• Publication Number:
  US 20050093090A1
• Time in Patent Office: Days
• US Class Current: 257/528
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01Q 1/38 formed by a conductive layer on an insulating support patch antennas H01Q9/0407; microstrip dipole antennas H01Q9/065; microstrip slot antennas H01Q13/106; transmission line microstrip antennas H01Q13/206; manufacturing reflecting surfaces using insulating material for supporting the reflecting surface H01Q15/142
• CPC Class Codes: H01Q 7/00 Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop

Abstract

Exemplary embodiments of the present invention provide a semiconductor device that can be produced less costly and a manufacturing method thereof A semiconductor device according to exemplary embodiments of the invention includes an IC chip, an antenna coil formed on an active surface of the IC chip and connected to the IC chip for non-contact data communication, a connecting pad formed on the active surface of the IC chip and connected to one end of the antenna coil, one end of connecting device formed on the active surface of the IC chip and connected to the other end of the antenna coil, and a connecting pad formed on the active surface of the IC chip and connected to the other end of the connecting device. The antenna coil is connected to the internal circuit of the IC chip through the connecting pad, the connecting device, and the connecting pad.

Claims

1. A semiconductor device, comprising:

an IC chip having an internal circuit; and

an antenna coil formed on at least one of an active and a back surface of the IC chip and connected to the internal circuit of the IC chip for non-contact data communication.

2. A semiconductor device, comprising:

an IC chip having an active surface;

an antenna coil formed on the active surface of the IC chip and connected to the IC chip for non-contact data communication;

a first pad formed on the active surface of the IC chip and connected to one end of the antenna coil;

one end of a connecting device formed on the active surface of the IC chip and connected to a other end of the antenna coil; and

a second pad formed on the active surface of the IC chip and connected to the other end of the connecting device,

the antenna coil being connected to an internal circuit of the IC chip through the first pad, the connecting device, and the second pad.

3. A semiconductor device, comprising:

an IC chip having an internal circuit;

an antenna coil formed on a back surface of the IC chip and connected to the IC chip for non-contact data communication;

a first through hole connected to one end of the antenna coil and formed in the IC chip;

one end of a connecting device formed on the back surface of the IC chip and connected to a other end of the antenna coil; and

a second through hole connected to the other end of the connecting device and formed in the IC chip,

the antenna coil being connected to the internal circuit of the IC chip through the first through hole, the connecting device, and the second through hole.

4. A semiconductor device, comprising:

a flexible substrate;

an IC chip fixed on the flexible substrate; and

an antenna coil formed on at least one of an active and a back surface of the IC chip and connected to an internal circuit of the IC chip for non-contact data communication.

5. A semiconductor device, comprising:

a card substrate;

a recess provided at a surface of the card substrate;

an IC chip fitted into the recess;

an antenna coil formed on at least one of an active and a back surface of the IC chip and connected to the internal circuit of an IC chip for non-contact data communication; and

a protection film attached on the IC chip and the card substrate.

6. A method of producing a semiconductor device, comprising:

forming a semiconductor circuit on a semiconductor substrate;

forming a passivation film on an upper side of the semiconductor substrate; and

forming an antenna coil for non-contact data communication, on the passivation film,

the antenna coil being connected to the semiconductor circuit.

7. The method of producing a semiconductor device according to claim 6, the antenna coil having one end connected to the semiconductor circuit through a first pad and a other end connected to the semiconductor circuit through a connecting device and a second pad.

8. The method of producing a semiconductor device according to claim 6, in forming an antenna coil, a metal film being formed on the passivation film, and the metal film being patterned to form an antenna coil made of the metal film on the passivation film.

9. The method of producing a semiconductor device according to claim 6, in forming an antenna coil, an antenna coil made of a metal film being formed on the passivation film using an inkjet mechanism.

10. The method of producing a semiconductor device according to claim 6, in forming an antenna coil, a groove in an antenna coil pattern being formed in the passivation film, a metal film being formed in the groove and on the passivation film, and the metal film being polished by CMP, so that the metal film located on the passivation film is removed and an antenna coil made of the metal film is formed in the groove in the passivation film.

11. A method of producing a semiconductor device, comprising:

forming a semiconductor circuit in a semiconductor substrate;

forming first and second through holes in the semiconductor substrate; and

forming an antenna coil for non-contact data communication, on a back surface of the semiconductor substrate,

the antenna coil having one end electrically connected to the semiconductor circuit through the first through hole and a other end electrically connected to the semiconductor circuit through the second through hole.

12. A method of producing a semiconductor device, comprising:

preparing an IC chip having an antenna coil for non-contact data communication formed on at least one of an active and a back surface of the IC chip; and

fixing the IC chip on a flexible substrate.

13. A method of producing a semiconductor device, comprising:

preparing an IC chip having an antenna coil for non-contact data communication formed on at least one of an active and a back surface of the IC chip; and

preparing a card substrate having a recess at its surface;

fitting the IC chip into the recess at the card substrate; and

attaching a protection film on the IC chip and the card substrate.