Device packages with low stress assembly process
First Claim
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1. A packaged microelectromechanical device, comprising:
- a microelectromechanical array device that comprises a semiconductor substrate;
a package for the microelectromechanical array device, the package comprising a packaging substrate;
an insert substrate that is disposed between the semiconductor substrate and the package substrate; and
wherein the insert substrate has a CTE value that is the sane as a CTE value of the semiconductor substrate or between the value of the semiconductor substrate and a CTE value of the package substrate.
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Abstract
A microelectromechanical device package and a low-stress inducing method for packaging a microelectromechanical device are disclosed in this invention. The microelectromechanical device is accommodated within a cavity comprised by a first package substrate and a second substrate, wherein a third substrate is disposed between and bonded to both the microelectromechanical device lower semiconductor substrate and the package bottom substrate. The first and second package substrates are then bonded so as to package the microelectromechanical device inside.
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Citations
55 Claims
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1. A packaged microelectromechanical device, comprising:
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a microelectromechanical array device that comprises a semiconductor substrate;
a package for the microelectromechanical array device, the package comprising a packaging substrate;
an insert substrate that is disposed between the semiconductor substrate and the package substrate; and
wherein the insert substrate has a CTE value that is the sane as a CTE value of the semiconductor substrate or between the value of the semiconductor substrate and a CTE value of the package substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 23, 43, 54)
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22. (canceled).
- 24. The device of claim 24, wherein the first sealing medium layer further comprises a glass frit or solderable metallic material that bonds the first and second substrates together.
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35. A method of packaging a microelectromechanical array device having a semiconductor substrate to a package, the method comprising:
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selecting an insert substrate whose CTE value is the same as the CTE value of the semiconductor substrate or between the CTE value of the semiconductor substrate and a CTE value of a package substrate of the package;
attaching the semiconductor substrate to the insert substrate using an adhesive so as to form an assembly; and
attaching the insert substrate of said assembly to the package substrate using an adhesive. - View Dependent Claims (36, 37, 39, 40, 41, 42)
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38. (canceled)
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44. A packaged microelectromechanical device, comprising:
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a microelectromechanical array device that comprises a semiconductor substrate;
a package substrate having a cavity in which the microelectromechanical array device is disposed; and
an insert substrate that is disposed between the semiconductor substrate and the package substrate. - View Dependent Claims (45, 46, 47, 48)
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49. A packaged microelectromechanical device, comprising:
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a microelectromechanical array device that comprises a semiconductor substrate;
a ceramic package substrate having a supporting surface; and
an insert substrate that is disposed between the semiconductor substrate and the supporting surface of the ceramic package substrate. - View Dependent Claims (50, 51, 52, 53)
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55. A method of packaging a microelectromechanical array device having a semiconductor substrate to a package, the method comprising:
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selecting an insert substrate whose CTE value is the same as the CTE value of the semiconductor substrate or between the CTE value of the semiconductor substrate and a CTE value of a package substrate of the package;
attaching the package substrate to the insert substrate using an adhesive so as to form an assembly; and
attaching the insert substrate of said assembly to the semiconductor substrate using an adhesive.
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Specification