Electromechanical micromirror devices and methods of manufacturing the same
First Claim
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1. An electromechanical micromirror device, comprising:
- a single substrate with a 1st surface and a 2nd surface;
a control circuitry disposed on said 1st surface of said single substrate; and
a micromirror section disposed on said 2nd surface of said single substrate;
wherein said micromirror section comprises;
a micromirror; and
at least one support structure for supporting said micromirror.
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Abstract
An electromechanical micromirror device comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface, and a micromirror disposed on said 2nd surface. Arrays of such micromirror devices are also described and may be used as a spatial light modulators (SLMs). The arrays may be 1 dimensional (linear) or 2 dimensional. Methods of fabricating micromirror devices and arrays of such devices are also disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, and fabricating micromirror(s) on the 2nd surface.
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Citations
60 Claims
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1. An electromechanical micromirror device, comprising:
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a single substrate with a 1st surface and a 2nd surface;
a control circuitry disposed on said 1st surface of said single substrate; and
a micromirror section disposed on said 2nd surface of said single substrate;
wherein said micromirror section comprises;
a micromirror; and
at least one support structure for supporting said micromirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An array of electromechanical micromirror devices comprising:
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single substrate with a 1st surface and a 2nd surface;
a control circuitry disposed on said 1st surface of said substrate; and
an array of micromirror sections disposed on said 2nd surface of said single substrate wherein each said micromirror section comprises a micromirror; and
a support structure for supporting said micromirror. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A spatial light modulator (SLM) comprising an array of electromechanical micromirror devices wherein said micro-mirror devices further comprising:
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a single substrate with a 1st surface and a 2nd surface;
a control circuitry disposed on said 1st surface of said single substrate; and
an array of micromirror sections disposed on said 2nd surface of said single substrate wherein each said micromirror section comprises a micromirror; and
a support structure for supporting said micromirror.
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34. A method of fabricating an array of electromechanical micromirrors comprising the steps of:
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providing a single substrate with a 1st surface and a 2nd surface;
forming control circuitry on said 1st surface of said single substrate; and
forming a plurality of support structures on said second surface of said single substrate and forming a plurality of micromirrors on top of and supported by said support structures. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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52. A method of fabricating an array of electromechanical micromirrors, comprising the steps of:
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providing a single silicon-on-insulator substrate with an epitaxial top silicon layer above an insulator layer, supported by a bottom silicon layer;
forming control circuitry on said epitaxial top silicon layer;
removing said bottom silicon layer, thereby exposing the insulator layer;
forming a plurality of support structures followed by forming a plurality of micromirrors on top of and supported by said support structures. - View Dependent Claims (53, 54, 55, 56, 57, 58, 59, 60)
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Specification