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Electromechanical micromirror devices and methods of manufacturing the same

  • US 20050094241A1
  • Filed: 11/01/2003
  • Published: 05/05/2005
  • Est. Priority Date: 11/01/2003
  • Status: Abandoned Application
First Claim
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1. An electromechanical micromirror device, comprising:

  • a single substrate with a 1st surface and a 2nd surface;

    a control circuitry disposed on said 1st surface of said single substrate; and

    a micromirror section disposed on said 2nd surface of said single substrate;

    wherein said micromirror section comprises;

    a micromirror; and

    at least one support structure for supporting said micromirror.

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