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Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography

  • US 20050094245A1
  • Filed: 11/05/2004
  • Published: 05/05/2005
  • Est. Priority Date: 07/31/2003
  • Status: Active Grant
First Claim
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1. A maskless lithography system, comprising:

  • an illumination source configured to produce light beams;

    an object configured to be exposed by the light beams;

    a variable filter disposed between the illumination source and the object, and configured to change intensity transmission values based on a received signal; and

    a controller, wherein the controller is configured to modulate the intensity of the light beams by sending a signal to the variable filter to change intensity transmission between exposures.

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