Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography

• US 20050094245A1
• Filed: 11/05/2004
• Published: 05/05/2005
• Est. Priority Date: 07/31/2003
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Cebuhar, Wenceslao A., Hintersteiner, Jason D., Latypov, Azat, Volpe, Gerald
• Granted Patent: US 6,985,280 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G03F 7/70208 Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
• CPC Class Codes: G03F 7/70283 Mask effects on the imaging process
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose

Abstract

In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.

Claims

1. A maskless lithography system, comprising:

an illumination source configured to produce light beams;

an object configured to be exposed by the light beams;

a variable filter disposed between the illumination source and the object, and configured to change intensity transmission values based on a received signal; and

a controller,

wherein the controller is configured to modulate the intensity of the light beams by sending a signal to the variable filter to change intensity transmission between exposures.

2. The maskless lithography system of claim 1, further comprising between the illumination source and the object:

a spatial light modulator (SLM),

wherein the SLM has a plurality of pixels, and

wherein an active state of a pixel corresponds to transmitting light to the object by the pixel at a particular gray level, and an OFF state corresponds to transmitting no light to the object by the pixel.

3. The maskless lithography system of claim 2, wherein the SLM is a digital micromirror device.

4. The maskless lithography system of claim 2, wherein the SLM is a liquid crystal display.

5. The maskless lithography system of claim 1, wherein the object is a semiconductor wafer.

6. The maskless lithography system of claim 1, wherein the object is a liquid crystal display.

7. In a maskless lithography system having a spatial light modulator (SLM), a method of producing gray-scale on an object, the method comprising:

(a) passing a light beam through a variable filter at a first intensity transmission value to create a light beam having a first power;

(b) exposing the object with the light beam having the first power to produce a first pattern;

(c) passing a light beam through the variable filter at a second intensity transmission value to create a light beam having a second power; and

(d) exposing the object with the light beam having the second power to produce a second pattern,

such that the second pattern overlaps the first pattern and creates a range of grayscale levels on the object.

8. The method of claim 7, further comprising:

(e) passing a light beam through the variable filter at a different intensity transmission value from the first or second intensity transmission values to create a light beam having a different power; and

(f) exposing the object with the light beam having a different power to produce an additional pattern,

such that the additional pattern overlaps the first pattern and the second pattern.

9. The method of claim 8, further comprising:

(g) repeating steps (e) and (f) until a desired number of grayscale levels is achieved.