Magnetic thin film, magnetic component that uses this magnetic thin film, manufacturing methods for the same, and a power conversion device
First Claim
1. A magnetic thin film, comprising:
- a resin having magnetic fine particles dispersed therein.
2 Assignments
0 Petitions
Accused Products
Abstract
On top of a silicon substrate, a polyimide film with a thickness of 10 μm is formed. On top of this, a magnetic thin film that is a polyimide film containing Fe fine particles and that has a thickness of 20 μm is formed. On top of this magnetic thin film, a patterned Ti/Au film and a Ti/Au connection conductor are formed. On top of this, a polyimide film with a thickness of 10 μm, and a Cu coil with a height 35 μm, width 90 μm, space 25 μm, and a polyimide layer that fills the spaces in the Cu coil are formed. On top of this, via a polyimide film with a thickness of 10 μm, a magnetic thin film that is a polyimide film containing Fe particles and that has a thickness of 20 μm is formed. This thin film inductor has a small alternating current resistance. The present invention provides a magnetic thin film that is well suited for mass production, can be manufactured easily, can be made into a thick film, has soft magnetic qualities, and is inexpensive. The present invention also provides a magnetic component that uses this magnetic thin film, manufacturing methods for these, and a power conversion device.
46 Citations
31 Claims
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1. A magnetic thin film, comprising:
a resin having magnetic fine particles dispersed therein. - View Dependent Claims (2, 3, 4, 5, 7, 12, 13, 18, 19, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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6. A magnetic thin film, wherein:
said thin film is constructed from magnetic fine particles, and said fine particles are aggregated so that said fine particles are in contact with each other. - View Dependent Claims (14, 20)
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8-11. -11. (canceled)
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15-17. -17. (canceled)
Specification