Probe card for testing in-wafer photonic integrated circuits (PICs) and method of use
First Claim
1. A probe card for testing in-wafer photonic integrated circuits (PICs) comprising a plurality of in-wafer photonic integrated circuit (PIC) die formed in the surface of a semiconductor wafer where each PIC comprises one or more electro-optic components with formed surface electrical contacts, comprising:
- a probe card body having at least one row of downwardly dependent, electrically conductive contact probes;
means to move said contact probes transversely over the surface of the wafer to a selected in-wafer photonic integrated circuit (PIC) die;
means to move said contact probes into engagement with surface electrical contacts of the selected photonic integrated circuit (PIC) die for testing the operation of electro-optic components in the selected in-wafer photonic integrated circuit (PIC) die.
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Accused Products
Abstract
Method and apparatus for utilizing a probe card for testing in-wafer photonic integrated circuits (PICs) comprising a plurality of in-wafer photonic integrated circuit (PIC) die formed in the surface of a semiconductor wafer where each PIC comprises one or more electro-optic components with formed wafer-surface electrical contacts. The probe card has a probe card body with at least one row of downwardly dependent, electrically conductive contact probes. The probe body is transversely translated over the surface of the wafer to a selected in-wafer photonic integrated circuit (PIC) die. Then, the contact probes of the probe card are brought into engagement with surface electrical contacts of the selected photonic integrated circuit (PIC) die for testing the operation of electro-optic components in the selected in-wafer photonic integrated circuit (PIC) die.
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Citations
11 Claims
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1. A probe card for testing in-wafer photonic integrated circuits (PICs) comprising a plurality of in-wafer photonic integrated circuit (PIC) die formed in the surface of a semiconductor wafer where each PIC comprises one or more electro-optic components with formed surface electrical contacts, comprising:
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a probe card body having at least one row of downwardly dependent, electrically conductive contact probes;
means to move said contact probes transversely over the surface of the wafer to a selected in-wafer photonic integrated circuit (PIC) die;
means to move said contact probes into engagement with surface electrical contacts of the selected photonic integrated circuit (PIC) die for testing the operation of electro-optic components in the selected in-wafer photonic integrated circuit (PIC) die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method testing in-wafer photonic integrated circuits (PICS) comprising a plurality of in-wafer photonic integrated circuit (PIC) die formed in the surface of a semiconductor wafer where each PIC comprises one or more electro-optic components with formed surface electrical contacts, comprising the steps of:
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translating a probe card body with at least one row of downwardly dependent, electrically conductive contact probes over the wafer surface;
selecting an in-wafer photonic integrated circuit (PIC) die for circuit test by translating the probe card body over the same;
engaging at least some of the contact probes with surface electrical contacts of the selected photonic integrated circuit (PIC) die;
operating the electro-optic component via at least some of the probe contacts;
retrieving operational parameter data of the electro-optic component via at least some of the other probe contacts; and
retaining the retrieved data for future use when the tested in-wafer photonic integrated circuit (PIC) die are removed from the wafer as PIC chips. - View Dependent Claims (11)
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Specification