Automated material handling system
First Claim
1. A semiconductor workpiece processing system comprising:
- at least one processing tool for processing semiconductor workpieces;
a container for holding at least one semiconductor workpiece therein for transport to and from the processing tool;
a first transport section connected to the processing tool for transporting the container to and from the processing tool; and
a second transport section connected to the first transport section for transporting the container to and from the processing tool;
wherein the first transport section is a vehicle based section having a transport vehicle capable of holding the container and moving along a first track of the first transport section, and the second transport section is not a vehicle based section and has a second track with at least one support element of the second track adapted to interface with the container for movably supporting the container from the second track and allowing the container to move relative to the first track, and wherein the second transport section has a motor connected to the second track for aligning the container on the second track with the transport vehicle on the first track.
2 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor workpiece processing system comprising at least one processing tool, a container, a first transport section, and a second transport section. The processing tool is used for processing semiconductor workpieces. The container is used for holding at least one semiconductor workpiece therein for transporting two and from the processing tool. The first transport section is connected to the processing tool for transporting the container to and from the processing tool. The second transport section is connected to the first transport section for transporting the container to and from the processing tool. The first transport section is vehicle based having a transport vehicle capable of holding the container and moving along a first track of the first transport section. The second transport section is not vehicle based and has a second track with at least one support element thereon adapted to interface with the container for movably supporting the container from the second track and allowing the container to move relative to the first track. The first track and second track are disposed proximate to each other to allow the container to moved therebetween in one move.
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Citations
44 Claims
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1. A semiconductor workpiece processing system comprising:
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at least one processing tool for processing semiconductor workpieces;
a container for holding at least one semiconductor workpiece therein for transport to and from the processing tool;
a first transport section connected to the processing tool for transporting the container to and from the processing tool; and
a second transport section connected to the first transport section for transporting the container to and from the processing tool;
wherein the first transport section is a vehicle based section having a transport vehicle capable of holding the container and moving along a first track of the first transport section, and the second transport section is not a vehicle based section and has a second track with at least one support element of the second track adapted to interface with the container for movably supporting the container from the second track and allowing the container to move relative to the first track, and wherein the second transport section has a motor connected to the second track for aligning the container on the second track with the transport vehicle on the first track. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A semiconductor workpiece container transport system comprising:
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at least one semiconductor workpiece container adapted for holding at least one semiconductor workpiece therein, the semiconductor workpiece container having a one-piece frame assembly;
a track for movably supporting the at least one semiconductor workpiece container so that the at least one semiconductor workpiece container is capable of moving along the track; and
a motor connected to the track for driving the at least one container along the track, wherein at least part of the motor is mounted to the frame assembly of the at least one container. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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28. A semiconductor workpiece transport container comprising:
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a frame defining a chamber for holding therein at least one semiconductor workpiece, the frame being sized and shaped for interfacing with an interfacing portion of a semiconductor workpiece processing tool to allow the at least one semiconductor workpiece to be transported between the chamber and processing tool, wherein the frame defines at least one surface for seating against a track of a transport system for transporting the container between the processing tool and another location; and
a motor portion mounted to the frame, the motor portion being adapted to cooperate with another motor portion of the transport system for driving the container along the track. - View Dependent Claims (29, 30, 31, 32, 33)
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34. A semiconductor workpiece processing system comprising:
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at least one processing tool for processing semiconductor workpieces;
a first transport section connected to the processing tool for transporting containers holding semiconductor workpieces to and from the processing tool; and
a second transport section connected to the first transport section for transporting the containers to and from the processing tool;
wherein the first transport section is a vehicle based section having a transport vehicle capable of holding at least one of the containers and moving along a first track of the first transport section, and the second transport section is not a vehicle based section and has a second track with support elements thereon adapted to interface the containers for movably supporting the containers from the second track and allowing the containers to move bi-directionally relative to the track, and wherein the second transport section has a motor connected to the second track capable of bi-directionally driving the containers substantially simultaneously on at least one portion of the second track. - View Dependent Claims (35, 36, 37, 38)
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39. A semiconductor workpiece processing system comprising:
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at least one processing tool for processing semiconductor workpieces;
a container for holding at least one semiconductor workpiece therein for transport to and from the processing tool;
a first transport section connected to the processing tool for transporting the container to and from the processing tool, the first transport section having a first track and a transport vehicle movably supported from the first track and capable of picking the container; and
a second transport section connected to the first transport section for transporting the container to and from the processing tool, the second transport section having a conveyor track with a track surface adapted to interface with the container, and a motor connected to the conveyor track for moving the container on the conveyor track;
wherein the motor is adapted for stopping the container at any location along a portion of the conveyor track so that the container is in a predetermined position relative to the transport vehicle for providing a pickplace for the vehicle to pick the container. - View Dependent Claims (40, 41, 42)
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43. The system according to claim 43, wherein at least a portion of the motor provides the position sensor.
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44. A material handling system for transporting a container capable of holding at least one workpiece and transporting the at least one workpiece in a controlled environment between a workpiece processing tool and another location, the system comprising:
a conveyor transport section including a drive track for driving the container, the track having track elements interfacing with the container for driving the container, wherein the drive track is modular with modules adapted to be joined together to form extended lengths of the drive track during drive track installation, wherein each module has at least one of the track elements thereon.
Specification