×

Automated material handling system

  • US 20050095087A1
  • Filed: 10/30/2003
  • Published: 05/05/2005
  • Est. Priority Date: 10/30/2003
  • Status: Abandoned Application
First Claim
Patent Images

1. A semiconductor workpiece processing system comprising:

  • at least one processing tool for processing semiconductor workpieces;

    a container for holding at least one semiconductor workpiece therein for transport to and from the processing tool;

    a first transport section connected to the processing tool for transporting the container to and from the processing tool; and

    a second transport section connected to the first transport section for transporting the container to and from the processing tool;

    wherein the first transport section is a vehicle based section having a transport vehicle capable of holding the container and moving along a first track of the first transport section, and the second transport section is not a vehicle based section and has a second track with at least one support element of the second track adapted to interface with the container for movably supporting the container from the second track and allowing the container to move relative to the first track, and wherein the second transport section has a motor connected to the second track for aligning the container on the second track with the transport vehicle on the first track.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×