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Load lock chamber for large area substrate processing system

  • US 20050095088A1
  • Filed: 04/26/2004
  • Published: 05/05/2005
  • Est. Priority Date: 10/20/2003
  • Status: Active Grant
First Claim
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1. A load lock chamber comprising:

  • a chamber body having a first side adapted for coupling to a vacuum chamber and a second side adapted for coupling to a factory interface;

    N vertically stacked substrate transfer chambers formed in the chamber body, where N is an integer greater than two; and

    N−

    1 interior walls, each interior wall separating and environmentally isolating adjacent substrate transfer chambers.

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