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Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit

  • US 20050095098A1
  • Filed: 10/21/2004
  • Published: 05/05/2005
  • Est. Priority Date: 10/23/2003
  • Status: Active Grant
First Claim
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1. A pod clamping unit for fixing a pod to a mounting board in a pod opener, which has a pod main body to open at one side and a lid to open and close said opening and, at the same time, fixes the pod capable of accommodating a wafer in its interior on a mounting board surface and opens and closes said lid so that the inserting and taking out of said wafer into and from the interior of said pod is made possible, said pod clamping unit, comprising:

  • a horizontal cylinder which is fixed to the rear surface of said mounting board and supports one end of a horizontal cylinder rod, and at the same time, expands and contracts said horizontal cylinder rod in a first direction;

    a vertical cylinder, which is fixed to the other end of said horizontal cylinder rod and supports one end of a vertical cylinder rod and, at the same time, expands and contacts said vertical cylinder rod in a second direction; and

    a clamp member fixed to the other end of said vertical cylinder rod;

    wherein said mounting board is further insertable with said vertical cylinder rod and comprises an opening which makes it possible that said clamp member exists in the surface side of said mounting board, and wherein said clamp member, in a state where said vertical cylinder rod is shrunk, is positioned at a predetermined height from said mounting board surface, which does not contact with a bottom face of said pod when said pod is mounted on said mounting board surface.

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