Please download the dossier by clicking on the dossier button x
×

Micromechanical structural element having a diaphragm and method for producing such a structural element

  • US 20050098840A1
  • Filed: 10/19/2004
  • Published: 05/12/2005
  • Est. Priority Date: 11/07/2003
  • Status: Active Grant
First Claim
Patent Images

1. A micromechanical structural element comprising:

  • at least one diaphragm arrangement, wherein the structural element structure is implemented in a layer construction on a substrate, the layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, and the diaphragm arrangement is developed in the diaphragm layer, a cavity being under the at least one diaphragm arrangement in the sacrificial layer; and

    at least one stabilizing element to stabilize the diaphragm, the at least one stabilizing element extending into the cavity.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×