Semiconductor device and display device

• US 20050099550A1
• Filed: 09/29/2004
• Published: 05/12/2005
• Est. Priority Date: 09/30/2003
• Status: Abandoned Application

• Current Assignee: Sanyo Electric Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Sanyo Electric Company Limited (Panasonic Holdings Corporation)
• Inventors: Jinno, Yushi
• Application Number:
  US10/952,957
• Publication Number:
  US 20050099550A1
• Time in Patent Office: Days
• US Class Current: 349/41
• CPC Class Codes: G02F 1/136259 Repairing; Defects
• CPC Class Codes: H01L 21/76894 using a laser, e.g. laser cutting, laser direct writing, laser repair
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 71/861 Repairing

Abstract

In a deficient defect (disconnection) portion of, for example, power supply lines formed on a same substrate and set to a same potential, ends of the disconnection and power supply lines adjacent to the power supply line in which disconnection occurs are connected by a same repair line. The repair line pattern can be formed, for example, through a drawing process by scanning a formation region of the repair line pattern with a laser beam in a gas atmosphere of a conductive material such as tungsten. By connecting the repair line pattern to not only the disconnection portion, but also to adjacent power supply lines, the line resistance can be reduced and flatness over the repair line pattern can be improved.

Claims

1. A semiconductor device, wherein

in a deficient defect portion of a plurality of line patterns formed over a same substrate and set to a same potential, ends of a deficiency are connected to each other with a pattern of a conductive material for repair and a line pattern adjacent to the line pattern in which the deficient defect occurs and the deficient defect portion are connected to each other with a pattern of a conductive material for repair.

2. A semiconductor device according to claim 1, wherein

the line pattern is a line for supplying current to a plurality of pixels formed over the substrate.

3. A semiconductor device according to claim 2, wherein

the plurality of line patterns are covered by an insulating film;

and

the pattern of conductive material for repair is electrically connected, via a contact hole formed through the insulating film, to the line pattern exposed at a bottom of the contact hole.

4. A semiconductor device according to claim 3, wherein

the pattern of conductive material for repair is a pattern formed by irradiating the deficient end with a laser from above the insulating film to form an opening through the insulating film and scanning a laser beam in a material gas of the conductive material for repair to form the pattern on a scan trace.

5. A semiconductor device according to claim 2, wherein

the pattern of conductive material for repair is covered with a protection film.

6. A semiconductor device according to claim 1, wherein

the plurality of line patterns are covered by an insulating film;

and

the pattern of conductive material for repair is electrically connected, via a contact hole formed through the insulating film, to the line pattern exposed at a bottom of the contact hole.

7. A semiconductor device according to claim 6, wherein

the pattern of conductive material for repair is a pattern formed by irradiating the deficient end with a laser from above the insulating film to form an opening through the insulating film and scanning a laser beam in a material gas of the conductive material for repair to form the pattern on a scan trace.

8. A semiconductor device according to claim 1, wherein

a material of the pattern of conductive material for repair contains tungsten.

9. A semiconductor device according to claim 1, wherein

the pattern of conductive material for repair is covered with a protection film.

10. A display device comprising:

a plurality of pixels each having a display element and a plurality of line patterns for supplying power to the plurality of pixels from a same power supply, wherein

in a deficient defect portion of the line pattern, ends of the deficiency are connected to each other with a pattern of a conductive material for repair and a line pattern adjacent to the line pattern in which the deficient defect occurs and the deficient defect portion are connected to each other with a pattern of a conductive material for repair.

11. A display device according to claim 10, wherein

each of the plurality of pixels further comprises a switching element for operating the display element;

the plurality of line patterns are current supply line patterns each of which is connected to a corresponding one of the switching elements for supplying current to the display element through the switching element;

an insulating film is formed covering the current supply line pattern; and

the display element is placed above the insulating film.

12. A display device according to claim 11, wherein

the display element is an organic electroluminescence element having an organic layer.

13. A display device according to claim 11, wherein

the pattern of conductive material for repair is covered with a protection film.

14. A display device according to claim 13, wherein

the protection film is a protection film formed by deposition subsequent to formation, by deposition, of the pattern of conductive material for repair.

15. A display device according to claim 10, wherein

the pattern of conductive material for repair is covered with a protection film.

16. A display device according to claim 15, wherein

the protection film is a film formed by deposition subsequent to formation, by deposition, of the pattern of conductive material for repair.

17. A display device according to claim 10, wherein

each of the plurality of pixels further comprises a transistor for operating the display element;

the transistor is formed between a lower electrode of the display element and a substrate;

each of the plurality of line patterns is a current supply line pattern connected to a corresponding one of the transistors for supplying current to the display element through the transistor;

a planarizing insulating film is formed covering the current supply line pattern;

the pattern of conductive material for repair is formed above the planarizing insulating film;

a protection film is formed covering the pattern of conductive material for repair; and

the lower electrode of the display element is formed above the protection film.

18. A display device according to claim 17, wherein

the protection film is an insulating film containing silicon.

19. A display device according to claim 17, wherein

the protection film is a silicon nitride film and also functions as a moisture block film which prevents entrance of moisture from the side of the planarizing insulating film to the display element.

20. A display device according to claim 10, wherein

each of the plurality of pixels further comprises a transistor for operating the display element;

the transistor is formed between a lower electrode of the display element and a substrate;

each of the plurality of line patterns is a current supply line pattern connected to a corresponding one of the transistors for supplying current to the display element through the transistor;

an insulating film is formed covering the current supply line pattern,

the pattern of conductive material for repair is formed above the insulating film;

a planarizing insulating film is formed covering the pattern of conductive material for repair and the insulating film; and

the lower electrode of the display element is formed above the planarizing insulating film.

21. A display device according to claim 20, wherein

the insulating film covering the current supply line pattern is an insulating film containing silicon.

22. A display device according to claim 10, wherein

a material of the pattern of conductive material for repair contains tungsten.