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Movable stage system, lithographic apparatus, and device manufacturing method

  • US 20050099616A1
  • Filed: 06/10/2004
  • Published: 05/12/2005
  • Est. Priority Date: 06/11/2003
  • Status: Active Grant
First Claim
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1. A movable stage system, comprising:

  • a base;

    a platform that is movable relative to the base;

    a balance mass that is movable relative to the base and is configured to compensate for forces generated by a movement of the platform; and

    a drive mechanism configured to move the platform and the balance mass relative to the base, the drive mechanism comprising;

    at least one belt transmission that couples the platform and the balance mass such that when the platform moves along a direction, the balance mass is moved in an at least partially opposite direction; and

    a drive configured to mechanically engage the balance mass or the platform to directly drive the platform or the balance mass.

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