Flat panel display manufacturing apparatus
First Claim
1. A flat panel display manufacturing apparatus comprising:
- a chamber under vacuum, a substrate pedestal located in a lower portion of the chamber, on the substrate pedestal being disposed a substrate so that a predetermined process is performed on the substrate using plasma generated in the chamber, and a shower head, wherein the shower head comprises;
a shower head body located in an upper portion of the chamber, the shower head body having a hollow structure opened at a lower surface thereof;
a diffusion plate horizontally mounted in the shower head body and having a plurality of diffusion holes formed through predetermined positions;
a spray plate spaced apart from the diffusion plate by an even predetermined height so as to be mounted at the open lower surface of the shower head body, the spray plate having a plurality of spray holes formed through predetermined positions; and
spray plate supporting members connected at their lower ends to the spray plate and connected at their upper ends to a top wall surface of the shower head body for supporting and fixing the spray plate relative to the shower head body.
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.
143 Citations
37 Claims
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1. A flat panel display manufacturing apparatus comprising:
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a chamber under vacuum, a substrate pedestal located in a lower portion of the chamber, on the substrate pedestal being disposed a substrate so that a predetermined process is performed on the substrate using plasma generated in the chamber, and a shower head, wherein the shower head comprises;
a shower head body located in an upper portion of the chamber, the shower head body having a hollow structure opened at a lower surface thereof;
a diffusion plate horizontally mounted in the shower head body and having a plurality of diffusion holes formed through predetermined positions;
a spray plate spaced apart from the diffusion plate by an even predetermined height so as to be mounted at the open lower surface of the shower head body, the spray plate having a plurality of spray holes formed through predetermined positions; and
spray plate supporting members connected at their lower ends to the spray plate and connected at their upper ends to a top wall surface of the shower head body for supporting and fixing the spray plate relative to the shower head body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification