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Triode Field Emission Cold Cathode Devices with Random Distribution and Method

  • US 20050104506A1
  • Filed: 11/18/2003
  • Published: 05/19/2005
  • Est. Priority Date: 11/18/2003
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing a triode field emission cold cathode device having randomly distributed field emission emitters comprising the steps of:

  • providing a substrate (10);

    depositing a first conductive layer (11) on the substrate;

    spraying the preceding layer with a random pattern of masking material (20);

    depositing an insulating layer (13) on the masked preceding layer;

    depositing a second conductive layer (14) on the insulting layer; and

    removing the masking material.

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