Two-dimensional stepwise-controlled microstructure

• US 20050105940A1
• Filed: 12/06/2004
• Published: 05/19/2005
• Est. Priority Date: 07/03/2001
• Status: Active Grant

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: PTS Corporation
• Inventors: Buzzetta, Victor
• Granted Patent: US 7,042,609 B2
• Time in Patent Office: Days
• US Class Current: 399/323
• CPC Class Codes: G02B 6/29307 components assembled in or forming a solid transparent unitary block, e.g. for facilitating component alignment
• CPC Class Codes: G02B 6/2931 Diffractive element operating in reflection
• CPC Class Codes: G02B 6/29311 Diffractive element operating in transmission
• CPC Class Codes: G02B 6/29383 Adding and dropping
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3558 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/3564 Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A microstructure is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.

Claims

1. A microstructure comprising:

a structural film;

a pivot member connected with the structural film and supporting a base;

at least three noncollinear actuators connected with the structural film, each such actuator being configured to deflect the base towards the structural film upon activation; and

a movable stop, wherein the base assumes one of a plurality of tilt positions according to which of such actuators is activated and according to a position of such movable stop.

3. The microstructure recited in claim 1 wherein the movable stop comprises a plurality of discrete levels, each of which contacts the base in one of such plurality of tilt positions.

4. The microstructure recited in claim 1 wherein the movable stop is linearly actuated.

5. The microstructure recited in claim 1 further comprising a plurality of noncollinear movable stops, wherein the base assumes one of a plurality of tilt positions according to which of such actuators is activated and according to a position for each of such movable stops.

6. The microstructure recited in claim 5 wherein the number of movable stops is equal to the number of actuators.

7. The microstructure recited in claim 5 wherein a subset of the plurality movable stops are configured to move collinearly.

8. The microstructure recited in claim 7 wherein the movable stops in the subset are connected with each other.

9. The microstructure recited in claim 5 wherein each movable stop comprises a plurality of discrete levels, each of which contacts the base in at least one of such plurality of tilt positions.

10. The microstructure recited in claim 9 wherein each of such movable stops comprises the same number of discrete levels.

11. The microstructure recited in claim 5 wherein each of such movable stops is linearly actuated.

12. The microstructure recited in claim 1 wherein the pivot member comprises a post pivot.

2. (canceled)

13. (canceled)

14. A method for fabricating a microstructure for steering light, the method comprising:

forming a pivot member on a structural film;

forming a base on the pivot member;

forming at least three noncollinear actuators over the structural film, each such actuator being configured to deflect the base towards the structural film upon activation; and

forming a movable stop such that the base may assume a plurality of tilt positions by activating a selection of such actuators and moving the movable stop to a desired position.

16. The method recited in claim 14 further comprising forming a plurality of movable stops such that the base may assume a plurality of tilt positions by activating a selection of such actuators and moving the plurality of movable stops to desired positions.

17. The method recited in claim 16 wherein a subset of the plurality of movable stops are connected with each other.

18. The method recited in claim 16 wherein forming the plurality of movable stops comprises forming a plurality of discrete levels on at least one of such movable stops, wherein each of the discrete levels is configured to contact the base in at least one of such plurality of tilt positions.

19. The method recited in claim 16 wherein forming the plurality of movable stops comprising forming a plurality of discrete levels on each movable stop, wherein each of the discrete levels is configured to contact the base in at least one of such plurality of tilt positions.

20. The method recited in claim 14 wherein forming the pivot member comprises forming a post pivot.

15. (canceled)

21-28. -28. (canceled)

29. A microstructure comprising:

support means;

structural means connected with the support means and tiltable to at least three tilt positions, wherein a first and second of such at least three tilt positions define a tilt axis and a third of such at least three tilt positions includes a tilt component orthogonal to the tilt axis, and wherein the structural means comprises moveable stop means connected with the support means to define the at least three tilt positions.

31. The microstructure recited in claim 29 wherein the structural means comprises a plurality of movable stop means connected with the support means to define the at least three tilt positions.

32. The microstructure recited in claim 31 wherein at least one of the plurality of movable stop means comprises a plurality of discrete levels, each of which corresponds with one of the at least three tilt positions.

30. (canceled)

33-36. -36. (canceled)