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Miniaturized flow controller with closed loop regulation

  • US 20050106739A1
  • Filed: 12/20/2004
  • Published: 05/19/2005
  • Est. Priority Date: 08/02/2000
  • Status: Active Grant
First Claim
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1. A method for providing a controlled flow stream from a non-precision pressure source, comprising:

  • providing a pressure to a pressure chamber using a non-precision pressure source, the pressure in the pressure chamber providing a velocity to the flow stream;

    sensing the velocity of the flow stream; and

    adjusting the pressure in the pressure chamber in response to the sensed velocity of the flow stream to control the velocity of the flow stream.

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