MEMS device and method of forming MEMS device
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Accused Products
Abstract
A method of forming a MEMS device includes depositing a conductive material on a substructure, forming a first sacrificial layer over the conductive material, including forming a substantially planar surface of the first sacrificial layer, and forming a first element over the substantially planar surface of the first sacrificial layer, including communicating the first element with the conductive material through the first sacrificial layer. In addition, the method includes forming a second sacrificial layer over the first element, including forming a substantially planar surface of the second sacrificial layer, forming a support through the second sacrificial layer to the first element after forming the second sacrificial layer, including, filling the support, and forming a second element over the support and the substantially planar surface of the second sacrificial layer. As such, the method further includes substantially removing the first sacrificial layer and the second sacrificial layer, thereby supporting the second element relative to the first element with the support.
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Citations
45 Claims
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1-27. -27. (canceled)
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28. A micro-mirror device, comprising:
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a substructure;
conductive material patterned on the substructure;
a hinge element supported over the substructure and communicated with the conductive material;
a reflective element supported over the hinge element; and
a support extended between the hinge element and the reflective element, wherein the support is filled with a plug material, and the reflective element contacts the plug material. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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41. A micro-mirror device, comprising:
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a substructure;
conductive material patterned on the substructure;
a hinge element extended over the substructure and communicated with the conductive material;
a reflective element extended over the hinge element; and
means for supporting the reflective element relative to the hinge element, including means for forming the reflective element with a substantially planar surface over an entirety thereof. - View Dependent Claims (42, 43, 44, 45)
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Specification