Manufacturing apparatus and method for predicting life of rotary machine used in the same
First Claim
1. A method for predicting life of a rotary machine used in a manufacturing apparatus, comprising:
- determining a starting time of an abnormal condition just before a failure of a monitor rotary machine used in a monitor manufacturing process, from monitor time-series data for characteristics of the monitor rotary machine, statistically analyzing the monitor time-series data, and finding a value for the characteristics at the starting time of the abnormal condition as a threshold of the abnormal condition;
measuring diagnosis time-series data for the characteristic of a motor current of a diagnosis rotary machine during a manufacturing process;
preparing diagnosis data from the diagnosis time-series data; and
determining a time for the diagnosis data exceeding the threshold as the life of the diagnosis rotary machine.
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Abstract
A method for predicting life of a rotary machine used in a manufacturing apparatus, includes: determining a starting time of an abnormal condition just before a failure of a monitor rotary machine used in a monitor manufacturing process, from monitor time-series data for characteristics of the monitor rotary machine, statistically analyzing the monitor time-series data, and finding a value for the characteristics at the starting time of the abnormal condition as a threshold of the abnormal condition; measuring diagnosis time-series data for the characteristic of a motor current of a diagnosis rotary machine during a manufacturing process; preparing diagnosis data from the diagnosis time-series data; and determining a time for the diagnosis data exceeding the threshold as the life of the diagnosis rotary machine.
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Citations
20 Claims
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1. A method for predicting life of a rotary machine used in a manufacturing apparatus, comprising:
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determining a starting time of an abnormal condition just before a failure of a monitor rotary machine used in a monitor manufacturing process, from monitor time-series data for characteristics of the monitor rotary machine, statistically analyzing the monitor time-series data, and finding a value for the characteristics at the starting time of the abnormal condition as a threshold of the abnormal condition;
measuring diagnosis time-series data for the characteristic of a motor current of a diagnosis rotary machine during a manufacturing process;
preparing diagnosis data from the diagnosis time-series data; and
determining a time for the diagnosis data exceeding the threshold as the life of the diagnosis rotary machine. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A manufacturing apparatus using a rotary machine, comprising:
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a diagnosis rotary machine performing a manufacturing process;
a measurement unit configured to measure diagnosis time-series data for characteristics of a motor current of the diagnosis rotary machine during the manufacturing process; and
a data processing unit configured to prepare diagnosis data from the diagnosis time-series data, and determine a time for the diagnosis data exceeding the threshold found statistically from a monitor time-series data for characteristics of a monitor rotary machine, as a life of the diagnosis rotary machine. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification