×

Vacuum valve

  • US 20050109968A1
  • Filed: 10/21/2003
  • Published: 05/26/2005
  • Est. Priority Date: 10/21/2003
  • Status: Active Grant
First Claim
Patent Images

1. A vacuum valve comprising:

  • a valve body with a valve opening;

    a valve plate which is movable between an open position in which it lies next to the valve opening and releases the valve opening and a closed position in which the valve opening is covered; and

    a diaphragm plate which is movable between a passive position, in which it lies next to the valve opening and releases the valve opening, and an active position in which it partially covers the valve opening;

    wherein the vacuum valve has a completely open state in which the valve plate is in its open position and the diaphragm plate is in its passive position, a completely closed state in which the valve plate is in its closed position and is sealed relative to the valve body, and a partially closed state in which the valve plate is in its open position and the diaphragm plate is in its active position, wherein the vacuum valve has a reduced cross section compared to the completely open state.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×