Microscopic batteries for MEMS systems
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Accused Products
Abstract
Microscopic batteries, integratable or integrated with and integrated circuit, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed.
60 Citations
140 Claims
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103. In combination, at least one microelectromechanical system and a source of electrical energy internal within the microelectromechanical system comprising a microfabricated microscopic battery having a size congruent with the microelectromechanical system.
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104. In combination, at least one microelectromechanical system, at lease one microfabricated microcircuit and a microfabricated microscopic battery integrated with the mocroelectromechanical system and having a size congruent with the system and the microcircuit, the battery being a low power loss internal source of electrical energy.
- 105. In combination, a microfabricated microscopic circuit, at least one microelectromechanical system and an aqueous microfabricated microscopic battery integrated with the microfabricated microscopic circuit and the microelectromechanical system having a size congruent with the microelectromechanical system, the battery being an internal low power loss source of electrical energy.
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111. A method comprising the steps of:
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microfabricating a microscopic battery size congruent with a microelectromechanical system by interconnecting a plurality of microfabricated microscopic battery cells;
directly integrating the microfabricated battery into a microfabricated microelectronic circuit and/or a microfabricated microelectromechanical system as an internal source of electrical power. - View Dependent Claims (112, 113, 114, 115, 116, 117)
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118. A method of making a microfabricated battery comprising the steps of:
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forming several microfabricated battery cells by depositing spaced microfabricated electrode layers on non-conducting material of each cell;
removing undesired sacrificial portions of at least one microfabricated film electrode layer of each cell;
interposing electrolyte between the microfabricated electrode layers of each cell;
electrically connecting the cells in a desired arrangement. - View Dependent Claims (119, 120, 121, 122, 123, 124, 125, 126)
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127. A microfabricated battery comprising a microfabricated rod-shaped electrode surrounded by a microscopic amount of electrolyte which is enclosed by a microfabricated electrode which surrounds the electrolyte.
- 128. A multi-cell rechargeable microfabricated battery which is energy efficient and characterized by low power losses for integration into microelectromechanical systems and other similarly sized microcircuitry, the microfabricated battery comprising a plurality of interconnected microfabricated battery cells, each cell comprising a microfabricated cathode, a microfabricated anode and a microscopic quantity of electrolyte enclosed within a casing.
- 133. A microfabricated conformal microscopic battery comprising a flexible layer for contiguous mounting on a non-flat surface and at least one microfabricated cell mounted on one side of the flexible layer and comprised of two microfabricated electrodes and a microscopic amount of electrolyte encased within an enclosure.
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137. In combination, at least one microelectromechanical system and a rechargeable microfabricated battery comprising an integrated internal source of electrical energy for the microelectromechanical system.
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138. In combination, a microelectromechanical system, a microfabricated circuit and a rechargeable microfabricated battery comprising a fully integrated internal source of electrical energy to the microelectromechanical system and the microfabricated circuit with low power losses associated therewith.
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139. In combination, a microfabricated circuit and/or a microelectromechanical system and a microfabricated battery fully integrated with the microfabricated circuit and/or microelectromechanical system to internally supply electrical energy to the microfabricated circuit and/or microelectromechanical system.
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140. A microelectromechanical system and a microfabricated battery fully and simultaneously integrated into the microelectromechanical system as an internal source of electrical energy, the microelectromechanical system and the microfabricated battery being formed in common using microfabricated deposition, sacrificial layer removal and etching techniques.
Specification