Lithographic alignment system and device manufacturing method
First Claim
1. A lithographic apparatus comprising:
- a radiation system configured to generate a beam of radiation;
a support structure for supporting a patterning device that configures said beam of radiation in accordance with a desired pattern;
a substrate holder configured to hold a substrate;
a projection system for projecting said patterned beam onto a target portion of the substrate; and
an alignment system comprising;
a radiation source configured to illuminate at least one mark on said substrate that is usable for alignment, said radiation source including a first mechanism that generates a coherent ray of light having a first wavelength spectrum which is relatively narrow and a second mechanism that is configured to guide said ray of light, said second mechanism having a second wavelength spectrum that is relatively broader than said first wavelength spectrum, and an imaging system configured to image light which has interacted with said at least one mark to provide alignment information.
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Accused Products
Abstract
A lithographic apparatus equipped with an improved alignment system, is presented herein. In one embodiment, the apparatus comprises a radiation system for providing a projection beam of radiation, a support structure for supporting a patterning device that configures the projection beam according to a desired pattern, a substrate holder for holding a substrate, projection system for projecting the patterned beam onto a target portion of the substrate, and an alignment system. The alignment system comprises a radiation source for illuminating at least one mark which is usable for alignment on a substrate and an imaging system for imaging light which has interacted with the at least one mark to generate alignment information.
42 Citations
17 Claims
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1. A lithographic apparatus comprising:
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a radiation system configured to generate a beam of radiation;
a support structure for supporting a patterning device that configures said beam of radiation in accordance with a desired pattern;
a substrate holder configured to hold a substrate;
a projection system for projecting said patterned beam onto a target portion of the substrate; and
an alignment system comprising;
a radiation source configured to illuminate at least one mark on said substrate that is usable for alignment, said radiation source including a first mechanism that generates a coherent ray of light having a first wavelength spectrum which is relatively narrow and a second mechanism that is configured to guide said ray of light, said second mechanism having a second wavelength spectrum that is relatively broader than said first wavelength spectrum, and an imaging system configured to image light which has interacted with said at least one mark to provide alignment information. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An alignment system for use in an apparatus which reproducibly processes substrates held on a substrate table, said alignment system comprising:
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a radiation source configured to illuminate at least one mark on said substrate that is usable for alignment, said radiation source including;
a first mechanism that generates a coherent ray of light having a first wavelength spectrum which is relatively narrow, and a second mechanism that is configured to guide said ray of light, said second mechanism having a second wavelength spectrum that is relatively broader than said first wavelength spectrum; and
an imaging system configured to image light which has interacted with said at least one mark to provide alignment information.
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16. A device manufacturing method, comprising:
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providing a substrate that is at least partially covered by a layer of radiation-sensitive material;
providing a beam of radiation using a radiation system;
using a patterning device to endow said beam of radiation with a desired pattern in its cross-section;
projecting the patterned beam of radiation onto a target portion of the layer of radiation-sensitive material; and
aligning the substrate using an alignment system, said aligning comprising;
illuminating at least one mark on said substrate which is usable for alignment by producing coherent light having a high brightness and a first wavelength spectrum which is relatively narrow and guiding said coherent light with a structure that has a second wavelength spectrum that is relatively broader than the first wavelength spectrum, and imaging light which has interacted with said at least one mark to derive alignment information. - View Dependent Claims (17)
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Specification