Micro-mirrors with flexure springs
First Claim
Patent Images
1. A micro-mirror device comprising:
- a micro-mirror; and
a flexure spring supporting said micro-mirror;
wherein said flexure spring is configured to store potential energy during movement of said micro-mirror that is released as kinetic energy to drive movement of said micro-mirror when said micro-mirror is re-oriented.
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Abstract
A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.
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Citations
46 Claims
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1. A micro-mirror device comprising:
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a micro-mirror; and
a flexure spring supporting said micro-mirror;
wherein said flexure spring is configured to store potential energy during movement of said micro-mirror that is released as kinetic energy to drive movement of said micro-mirror when said micro-mirror is re-oriented. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An array of micro-mirrors comprising:
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a plurality of micro-mirrors; and
a flexure spring supporting each said micro-mirror;
wherein each said flexure spring is configured to store potential energy during movement of a corresponding micro-mirror that is released as kinetic energy to drive movement of said corresponding micro-mirror when said corresponding micro-mirror is re-oriented. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 26, 27, 28, 29, 30)
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25. A micro-mirror device comprising:
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a micro-mirror; and
a means for selectively positioning said micro-mirror in a desired orientation;
wherein said means for selectively positioning said micro-mirror are configured to store potential energy during movement of said micro-mirror, which potential energy is released as kinetic energy to drive movement of said micro-mirror when said micro-mirror is re-oriented.
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31. A spatial light modulation device comprising:
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a micro-mirror; and
a pliant flexure supporting said micro-mirror, said flexure having a bias;
wherein said flexure stores energy when said micro-mirror and flexure are moved against said bias; and
wherein said flexure releases said stored energy to drive movement of said micro-mirror when a force against said bias is relaxed. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40)
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41. A method of forming a micro-mirror device, said method comprising:
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forming a flexure spring on a substrate; and
forming a micro-mirror supported on said flexure spring. - View Dependent Claims (42, 43, 44, 45, 46)
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Specification