Replica micro-resonator and method of fabrication

• US 20050111776A1
• Filed: 09/29/2004
• Published: 05/26/2005
• Est. Priority Date: 09/29/2003
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Vahala, Kerry J., Yang, Lan, Armani, Deniz K., Martin, Andrea L.
• Granted Patent: US 7,236,664 B2
• Time in Patent Office: Days
• US Class Current: 385/14
• CPC Class Codes: G02B 2006/1219 Polymerisation
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer

Abstract

Polymer micro-resonators and methods of fabricating the same. A liquid polymer material is applied to a micro-resonator master that includes at least one micro-resonator, such as a disk or toroid micro-resonator. The liquid molding material is cured or set to form a mold that is derived from the master. A replica of the master micro-resonator is cast using the mold, and the replicated micro-toroid resonator(s) are separated from the mold. The polymer micro-resonators can have Q factors up to about 5×10⁶. The mold and replica materials can be a silicone material, such as polydimethylsiloxane.

Claims

1. A method for molding and replicating a micro-resonator, comprising:

providing a micro-resonator master, the master having at least one micro-resonator;

forming a mold derived from the at least one micro-resonator of the master; and

casting a polymer replica of the at least one micro-resonator of the master with the mold,

whereby the molded polymer replica of the at least one micro-resonator has a Q factor greater than 1.5×

10⁵.

2. The method of claim 1, providing the micro-resonator master further comprising providing a micro-resonator master having a Q factor of at least 10⁶.

3. The method of claim 1, wherein a surface of the at least one micro-resonator of the master that supports a Q factor of at least 10⁶ is transferred to the mold and to the replica polymer resonator.

4. The method of claim 1, providing the micro-resonator master comprising providing a micro-resonator master having a reflowed outer periphery.

5. The method of claim 1, providing the micro-resonator master comprising providing a micro-resonator master having a micro-toroid resonator.

6. The method of claim 1, providing the micro-resonator master comprising providing a planar micro-resonator.

7. The method of claim 1, providing the micro-resonator master comprising providing a micro-resonator having an overhanging structure.

8. The method of claim 1, forming the mold further comprising forming a polymer mold.

9. The method of claim 8, forming the polymer mold comprising forming a silicone elastomer mold.

10. The method of claim 1, forming the mold further comprising forming a substantially transparent or clear mold.

11. The method of claim 1, forming the mold further comprising:

applying a liquid molding material to the micro-resonator master;

de-airing the liquid molding material; and

curing or setting the liquid molding material, thereby forming the mold.

12. The method of claim 11, curing further comprising curing the liquid molding material at about 80°

C. for about 60 minutes.

13. The method of claim 11, curing the molding material further comprising curing the liquid molding material at about 75°

C. for about 12 hours.

14. The method of claim 11, further comprising exposing the mold to an oxygen plasma.

15. The method of claim 1, casting the polymer replica further comprising casting a silicone replica of the micro-resonator master.

16. The method of claim 15, casting the silicone replica further comprising forming a silicone elastomer replica.

17. The method of claim 15, casting the silicone replica further comprising forming a polydimethylsiloxane replica.

18. The method of claim 1, casting the polymer replica further comprising forming a substantially transparent or clear replica.

19. The method of claim 1, casting the polymer replica further comprising casting an optical polymer replica, a styrene replica, an polymethacrylate replica, a perfluro compound replica, a resin replica, or an epoxy resin replica of the micro-resonator master.

20. The method of claim 1, casting the polymer replica further comprising casting a replica with a replica material that is different than the molding material.

21. The method of claim 1, casting the polymer replica further comprising casting a replica with a replica material that is the same as the molding material.

22. The method of claim 1, further comprising silanizing the micro-resonator master with trichloromethylsilane.

23. The method of claim 1, further comprising separating the polymer replica and the mold.

24. A method for molding and replicating a micro-resonator, comprising:

providing a micro-resonator master, the master having at least one micro-resonator, the at least one micro-resonator having an overhanging structure;

forming a mold derived from the micro-resonator master; and

casting a polymer replica of at least the overhanging structure of the micro-resonator with the mold.

25. The method of claim 24, providing the micro-resonator master further comprising providing a micro-resonator master having a Q factor of at least 10⁶.

26. The method of claim 24, wherein a surface of the at least one micro-resonator that supports a Q factor of at least 10⁶ is transferred to the mold and to the overhanging structure of the replica polymer resonator.

27. The method of claim 24, providing the micro-resonator comprising providing a micro-resonator master having a reflowed outer periphery.

28. The method of claim 24, the overhanging structure comprising a toroid structure.

29. The method of claim 24, the overhanging structure being supported above a base of the micro-resonator.

30. The method of claim 24, providing the micro-resonator master comprising providing a planar micro-resonator.

31. The method of claim 24, forming the mold comprising forming a polymer mold.

32. The method of claim 31, forming the polymer mold comprising forming a silicone elastomer mold.

33. The method of claim 24, forming the mold comprising forming a substantially transparent or clear mold.

34. The method of claim 24, forming the mold further comprising:

applying a liquid molding material to the micro-resonator master;

de-airing the liquid molding material; and

curing or setting the liquid molding material, thereby forming the mold.

35. The method of claim 34, curing comprising curing the liquid molding material at about 80°

C. for about 60 minutes.

36. The method of claim 34, curing the molding material comprising curing the liquid molding material at about 75°

C. for about 12 hours.

37. The method of claim 34, further comprising exposing the mold to an oxygen plasma.

38. The method of claim 24, casting the polymer replica comprising casting a polymer replica of the overhanging structure and a support of the micro-resonator with the mold.

39. The method of claim 24, casting the polymer replica comprising casting a silicone replica of the micro-resonator master.

40. The method of claim 39, casting the silicone replica comprising forming a silicone elastomer replica.

41. The method of claim 40, casting the silicone replica comprising forming an optical polymer replica, polydimethylsiloxane replica, a styrene replica, a polymethacrylate replica, a perfluro compound replica, a resin replica, or an epoxy resin replica of the micro-resonator master.

42. The method of claim 24, casting the polymer replica comprising casting a substantially transparent or clear replica.

43. The method of claim 24, casting the polymer replica comprising casting a replica with a replica material that is different from the molding material.

44. The method of claim 24, casting the polymer replica comprising casting a replica with a replica material that is the same as the molding material.

45. The method of claim 24, further comprising silanizing the micro-resonator master with trichloromethylsilane.

46. The method of claim 24, further comprising separating the polymer replica and the mold.

47. A method for molding and replicating a micro-resonator, comprising:

providing a micro-resonator master, the master having at least one planar micro-resonator;

forming a mold derived from the at least one planar micro-resonator of the master; and

casting a polymer replica of the at least one planar micro-resonator of the master with the mold.

48. A method for molding and replicating a micro-resonator, comprising:

providing a micro-resonator master, the master having at least one planar micro-resonator;

forming a mold derived from the at least one planar micro-resonator of the master; and

casting a polymer replica of the at least one planar micro-resonator of the master with the mold,

whereby the molded polymer replica of the at least one micro-resonator has a Q factor greater than 10⁶.

49. A micro-resonator, comprising:

a molded polymer micro-cavity; and

a substrate, the substrate supporting the polymer micro cavity, wherein the

molded polymer micro-cavity has a Q factor greater than 1.5×

10⁵.

50. The micro-resonator of claim 49, the molded polymer micro-cavity comprising an overhanging structure.

51. The micro-resonator of claim 49, the molded polymer microcavity having a Q factor of at least about 10⁶.

52. The micro-resonator of claim 49, the molded polymer micro-cavity comprising a silicone micro-cavity.

53. The micro-resonator of claim 52, the molded polymer micro-cavity comprising a silicone elastomer micro-cavity.

54. The micro-resonator of claim 53, wherein the molded polymer micro-cavity is a polydimethylsiloxane micro-cavity, a styrene micro-cavity, a polymethacrylate micro-cavity, a perfluro compound micro-cavity, a resin micro-cavity, or an epoxy resin micro-cavity.

55. The micro-resonator of claim 53, the polymer replica comprising a substantially transparent or clear replica.

56. The micro-resonator of claim 49, the molded polymer micro-cavity having a toroid shape.

57. The micro-resonator of claim 49, the molded polymer micro-cavity comprising a molded polymer planar micro-cavity.

58. A micro-resonator, comprising:

a molded polymer micro-cavity; and

a substrate, the substrate supporting the polymer micro-cavity, wherein the polymer micro-cavity includes an overhanging structure, the overhanging structure extending beyond a top edge of the substrate.

59. The micro-resonator of claim 58, the molded polymer micro-cavity having a Q factor of at least about 10⁶.

60. The micro-resonator of claim 58, the molded polymer micro-cavity comprising a silicone micro-cavity.

61. The micro-resonator of claim 60, the molded polymer micro-cavity comprising a silicone elastomer micro-cavity.

62. The micro-resonator of claim 61, wherein the molded polymer micro-cavity is an optical polymer replica, a polydimethylsiloxane micro-cavity, a styrene micro-cavity, a polymethacrylate micro-cavity, a perfluro compound micro-cavity, a resin micro-cavity, or an epoxy resin micro-cavity.

63. The micro-resonator of claim 58, the polymer replica comprising a substantially transparent or clear replica.

64. The micro-cavity of claim 58, the molded polymer micro-cavity having a toroid shape.

65. The micro-resonator of claim 58, the molded polymer micro-cavity comprising a molded polymer planar micro-cavity.

66. A micro-resonator, comprising:

a molded polymer planar micro-cavity; and

a substrate, the substrate supporting the molded polymer planar micro-cavity.

67. A micro-resonator, comprising:

a molded polymer planar micro-cavity; and

a substrate, the substrate supporting the molded polymer planar micro-cavity, wherein the molded polymer planar micro-cavity has a Q factor of at least 10⁶.

68. A method for molding a micro-resonator, comprising:

providing a micro-resonator master, the master having at least one micro-resonator;

forming a mold derived from the at least one micro-resonator of the master.

69. The method of claim 68, forming the mold further comprising:

applying a liquid molding material to the micro-resonator master;

de-airing the liquid molding material; and

curing or setting the liquid molding material, thereby forming the mold.

70. A method for replicating a micro-resonator, comprising:

casting a polymer replica of the at least one micro-resonator of the master with a mold that is derived from at least one micro-resonator of a micro-resonator master;

whereby the molded polymer replica has a Q factor greater than 1.5×

10⁵.71. The method of claim 70, casting the polymer replica comprising casting a polymer replica of an overhanging structure and a support of a micro-resonator.