Deposition mask and manufacturing method thereof
First Claim
1. A deposition mask comprising:
- a frame body having an opening; and
a mask body that includes a metal thin film, wherein the mask body has a pattern region including a plurality of passage holes through which a deposition material can pass;
a stress relaxation region including a plurality of fine holes provided at a periphery of the pattern region; and
a holding region provided at the periphery of the stress relaxation region, and wherein the mask body is mounted on the frame body at the holding region.
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Accused Products
Abstract
A deposition mask with which position precision of a passage hole is improved and deposition can be conducted precisely and a manufacturing method thereof are provided. A mask body made of a metal thin film is fixed and tightly mounted on a frame body having an opening. The mask body has at least one pattern region including a plurality of passage holes for letting through a deposition material, a stress relaxation region including a plurality of fine holes provided at the periphery of the pattern region, and a holding region provided at the periphery of the stress relaxation region. The mask body is tightly mounted on the frame body at a holding region.
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Citations
15 Claims
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1. A deposition mask comprising:
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a frame body having an opening; and
a mask body that includes a metal thin film, wherein the mask body has a pattern region including a plurality of passage holes through which a deposition material can pass;
a stress relaxation region including a plurality of fine holes provided at a periphery of the pattern region; and
a holding region provided at the periphery of the stress relaxation region, and whereinthe mask body is mounted on the frame body at the holding region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of manufacturing a deposition mask comprising:
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forming a mask body including at least one pattern region that includes a plurality of passage holes and a stress relaxation region including a plurality of fine holes formed around the pattern region on a metal thin film; and
mounting the mask body on a frame body having an opening at a holding region located in an outside of the stress relaxation region. - View Dependent Claims (15)
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Specification