Substrate treating apparatus and substrate treating method
First Claim
1. A substrate treating apparatus comprising:
- at least two types of treatment units selected from the group consisting of a chemical liquid treatment unit for holding and rotating a substrate by a substrate holding and rotating mechanism as well as supplying a chemical liquid from a chemical liquid nozzle to the substrate to treat the substrate, a scrubbing unit for holding and rotating a substrate by a substrate holding and rotating mechanism to supply deionized water to the substrate as well as scrubbing a surface of the substrate with a scrub brush, a polymer removal unit for holding and rotating a substrate by a substrate holding and rotating mechanism as well as supplying a polymer removal liquid to the substrate to remove a residue on the substrate, a peripheral end surface treatment unit for holding and rotating a substrate by a substrate holding and rotating mechanism as well as supplying a treatment liquid to an area including the whole of one surface and a peripheral end surface of the substrate so as to selectively remove an unnecessary material in the area, and a gas phase treatment unit for supplying a vapor including a chemical liquid or a vapor including a chemical gas to a substrate held in a substrate holding mechanism to treat the substrate; and
a substrate carrying mechanism for carrying a substrate into/out of at least the two types of treatment units.
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Accused Products
Abstract
A substrate treating apparatus includes at least two types of treatment units, and a substrate carrying mechanism for carrying a substrate into/out of at least the two types of treatment units. At least the two types of treatment units are selected out of a chemical liquid treatment unit for supplying a chemical liquid to the substrate, a scrubbing unit for scrubbing a surface of the substrate, a polymer removal unit for supplying a polymer removal liquid to the substrate, a peripheral end surface treatment unit for supplying a treatment liquid to an area including the whole of one surface and a peripheral end surface of the substrate, and a gas phase treatment unit for supplying a vapor to the substrate.
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Citations
27 Claims
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1. A substrate treating apparatus comprising:
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at least two types of treatment units selected from the group consisting of a chemical liquid treatment unit for holding and rotating a substrate by a substrate holding and rotating mechanism as well as supplying a chemical liquid from a chemical liquid nozzle to the substrate to treat the substrate, a scrubbing unit for holding and rotating a substrate by a substrate holding and rotating mechanism to supply deionized water to the substrate as well as scrubbing a surface of the substrate with a scrub brush, a polymer removal unit for holding and rotating a substrate by a substrate holding and rotating mechanism as well as supplying a polymer removal liquid to the substrate to remove a residue on the substrate, a peripheral end surface treatment unit for holding and rotating a substrate by a substrate holding and rotating mechanism as well as supplying a treatment liquid to an area including the whole of one surface and a peripheral end surface of the substrate so as to selectively remove an unnecessary material in the area, and a gas phase treatment unit for supplying a vapor including a chemical liquid or a vapor including a chemical gas to a substrate held in a substrate holding mechanism to treat the substrate; and
a substrate carrying mechanism for carrying a substrate into/out of at least the two types of treatment units. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A substrate treating method comprising at least two steps selected from the group consisting of:
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a chemical liquid treating step for supplying a chemical liquid to a substrate which is held and rotated by a substrate holding and rotating mechanism to treat the substrate;
a scrubbing step for supplying deionized water to a substrate which is held and rotated by a substrate holding and rotating mechanism as well as scrubbing a surface of the substrate with a scrub brush to remove foreign matter on the surface of the substrate;
a polymer removing step for supplying a polymer removal liquid to a substrate which is held and rotated by a substrate holding and rotating mechanism, to remove a residue on the substrate;
a peripheral end surface treating step for supplying a treatment liquid to an area including the whole of one of surfaces and a peripheral end surface of the substrate which is held and rotated by a substrate holding and rotating mechanism, to selectively remove an unnecessary material in the area;
a gas phase treating step for supplying a vapor including a chemical liquid or a vapor including a chemical gas to a substrate held in a substrate holding mechanism to treat the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A substrate treating apparatus comprising:
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a substrate holding and rotating mechanism for holding and rotating a substrate;
a resist stripping liquid nozzle for supplying a resist stripping liquid to a substrate to be treated which is held and rotated by the substrate holding and rotating mechanism; and
a polymer removal liquid nozzle for supplying a polymer removal liquid to a substrate to be treated which is held and rotated by the substrate holding and rotating mechanism. - View Dependent Claims (25)
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26. A substrate treating method comprising:
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a substrate holding and rotating step for holding and rotating a substrate by a substrate holding and rotating mechanism arranged in a treatment chamber, a resist stripping step for supplying a resist stripping liquid to the surface of the substrate which is held and rotated in the substrate holding and rotating step, to strip a resist film-on the substrate, and a polymer removing step for supplying a polymer removal liquid to a surface of the substrate which is held in the substrate holding and rotating step after the resist stripping step. - View Dependent Claims (27)
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Specification