Inductor for a system-on-a-chip and method for manufacturing the same
First Claim
Patent Images
1. An inductor comprising:
- a seed layer formed on a substrate; and
a conductive line formed on the seed layer, wherein the conductive line is formed by a plurality of connected conductive patterns grown from the seed layer.
1 Assignment
0 Petitions
Accused Products
Abstract
An inductor for a system-on-a-chip and a method for manufacturing the inductor are disclosed. The inductor comprises a conductive line formed by connecting a plurality of conductive patterns grown from a seed layer formed on a lower wiring. The method comprises using an electrolytic plating process or an electroless plating process to grow the plurality of adjacent conductive patterns from the seed layer until they become connected. The method also enables adjusting the height and width of the conductive line to desired levels.
-
Citations
58 Claims
-
1. An inductor comprising:
-
a seed layer formed on a substrate; and
a conductive line formed on the seed layer, wherein the conductive line is formed by a plurality of connected conductive patterns grown from the seed layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
-
17. An inductor comprising:
-
a substrate comprising a conductive structure;
a seed layer formed on the substrate;
a mold layer formed on the seed layer, wherein the mold layer includes hole arrays exposing the seed layer; and
a conductive line formed on the seed layer, wherein the conductive line is electrically connected to the conductive structure and is formed by a plurality of connected conductive patterns grown from the seed layer. - View Dependent Claims (18, 19, 20)
-
-
21. An inductor comprising:
-
a substrate including a conductive structure;
a mold layer formed on the substrate, wherein the mold layer comprises hole arrays having inner surfaces;
a seed layer formed on the inner surfaces of the hole arrays; and
a conductive line formed on the seed layer, wherein the conductive line is electrically connected to the conductive structure and is formed by a plurality of connected conductive patterns grown from the seed layer. - View Dependent Claims (22, 23, 24)
-
-
25. An inductor comprising:
-
a substrate including a conductive structure;
a mold layer formed on the substrate, wherein the mold layer comprises trenches having inner surfaces;
a seed layer formed on the inner surfaces of the hole arrays; and
a conductive line formed on the seed layer, wherein the conductive line is electrically connected to the conductive structure and is formed by a plurality of connected conductive patterns grown from the seed layer. - View Dependent Claims (26, 27, 28)
-
-
29. An inductor comprising:
-
a substrate including a conductive structure;
a mold layer formed on the substrate, wherein the mold layer comprises hole arrays having inner surfaces;
a first seed layer formed on the inner surfaces of the hole arrays and on the mold layer;
a capping layer formed on the first seed layer;
a second seed layer formed on portions of the capping layer positioned in the hole arrays; and
,a conductive line formed on the second seed layer, wherein the conductive line is electrically connected to the conductive structure and is formed by a plurality of connected conductive patterns grown from the second seed layer. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36)
-
-
37. A method for manufacturing an inductor, comprising:
-
forming a mold layer on a seed layer, wherein the mold layer comprises hole arrays exposing the seed layer;
forming conductive patterns on the mold layer from the seed layer to fill the hole arrays; and
forming a conductive line on the mold layer by growing the conductive patterns on the mold layer and connecting the conductive patterns. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
-
-
50. A method for manufacturing an inductor, comprising:
-
forming a mold layer on a seed layer, wherein the mold layer comprises trenches exposing the seed layer;
forming conductive patterns on the mold layer from the seed layer to fill the trenches; and
forming a conductive line on the mold layer by growing the conductive patterns on the mold layer and connecting the conductive patterns. - View Dependent Claims (51, 52)
-
-
53. A method of manufacturing an inductor comprising:
-
forming a mold layer on a substrate comprising a conductive structure, wherein the mold layer comprises hole arrays having inner surfaces;
forming a diffusion prevention layer on the inner surfaces of the hole arrays and on the mold layer;
forming seed layer patterns on portions of the diffusion prevention layer positioned in the hole arrays;
forming conductive patterns from the seed layer patterns to fill the hole arrays;
forming a conductive line on the mold layer by growing the conductive patterns on the mold layer and by connecting the conductive patterns; and
forming a protection layer on the conductive line. - View Dependent Claims (54, 55, 56)
-
-
57. A method of manufacturing an inductor comprising:
-
forming a mold layer on a substrate comprising a conductive structure, wherein the mold layer comprises hole arrays having inner surfaces;
forming a diffusion prevention layer on the inner surfaces of the hole arrays and on the mold layer;
forming a first seed layer on the diffusion prevention layer;
forming a capping layer on the first seed layer;
forming second seed layer patterns on portions of the capping layer positioned in the hole arrays;
forming conductive patterns from the second seed layer patterns to fill the hole arrays;
forming a conductive line on the mold layer by growing the conductive patterns on the mold layer and by connecting the conductive patterns; and
forming a protection layer on the conductive line. - View Dependent Claims (58)
-
Specification