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Spatial light modulator, spatial light modulator array, and exposure apparatus

  • US 20050117196A1
  • Filed: 09/22/2004
  • Published: 06/02/2005
  • Est. Priority Date: 09/22/2003
  • Status: Active Grant
First Claim
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1. A spatial light modulator comprising:

  • a substrate;

    a movable member provided above the substrate so as to hang across the substrate in a displaceable manner, wherein at least a portion of the movable member is a conductive section;

    an optical functional film that follows displacement of the movable member, the optical functional film being fixed to the movable member, wherein the optical functional film may be formed integrally with or separately from the movable member; and

    a fixed drive electrode disposed outside a range of rotational path within which mechanical displacement of the movable member becomes feasible, so as to cause displacement and driving of the movable member, wherein electrostatic attracting force is exerted between the movable member and the fixed drive electrode by a drive voltage application to at least one of the conductive section of said movable member and the fixed drive electrode, and the movable member is actuated and displaced with respect to the fixed drive electrode while maintaining the movable member in a non-contact state and then brought to a standstill, so as to modulate light radiated on the optical function film.

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