Method for forming MEMS grid array connector
First Claim
1. A method for forming a connector including a plurality of contact elements, the method comprising:
- providing a substrate;
forming a support layer on the substrate;
patterning the support layer to define a plurality support elements;
isotropically etching the plurality of support elements to form rounded corners on the top of each support element;
forming a metal layer on the substrate and on the plurality of support elements;
patterning the metal layer to define a plurality of contact elements, wherein each contact element includes a first metal portion on the substrate and a second metal portion extending from the first metal portion and partially across the top of a respective support element;
removing the plurality of support elements, wherein the plurality of contact elements thus formed each includes a base portion attached to the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate, the curved spring portion being formed to have a concave curvature with respect to the surface of the substrate.
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Accused Products
Abstract
A method for forming a connector including an array of contact elements includes forming a support layer on a substrate, patterning the support layer to define an array of support elements, isotropically etching the support elements to form rounded corners on the top of each support element, forming and patterning a metal layer to define an array of contact elements where each contact element includes a first metal portion on the substrate and a second metal portion extending from the first metal portion and partially across the top of a respective support element, and removing the support elements. The contact elements thus formed each includes a base portion attached to the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate. The curved spring portion is formed to have a concave curvature with respect to the surface of the substrate.
162 Citations
20 Claims
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1. A method for forming a connector including a plurality of contact elements, the method comprising:
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providing a substrate;
forming a support layer on the substrate;
patterning the support layer to define a plurality support elements;
isotropically etching the plurality of support elements to form rounded corners on the top of each support element;
forming a metal layer on the substrate and on the plurality of support elements;
patterning the metal layer to define a plurality of contact elements, wherein each contact element includes a first metal portion on the substrate and a second metal portion extending from the first metal portion and partially across the top of a respective support element;
removing the plurality of support elements, wherein the plurality of contact elements thus formed each includes a base portion attached to the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate, the curved spring portion being formed to have a concave curvature with respect to the surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for forming a connector including a plurality of contact elements, the method comprising:
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providing a substrate;
providing a conductive adhesion layer on the substrate;
forming a support layer on the conductive adhesion layer;
patterning the support layer to define a plurality support elements;
isotropically etching the plurality of support elements to form rounded corners on the top of each support element;
forming a metal layer on the conductive adhesion layer and on the plurality of support elements;
patterning the metal layer and the conductive adhesion layer to define a plurality of contact elements, wherein each contact element includes a first metal portion formed on a conductive adhesion portion and a second metal portion extending from the first metal portion and partially across the top of a respective support element; and
removing the plurality of support elements, wherein the plurality of contact elements thus formed each includes a base portion attached to the conductive adhesion portion which is attached to the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate, the curved spring portion being formed to have a concave curvature with respect to the surface of the substrate. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification