Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure
First Claim
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1. A test vehicle, comprising a substrate;
- a plurality of nested serpentine conductive lines on the substrate, each serpentine line having a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment; and
a plurality of test pads on the substrate, each connected to a respective portion of a respective one of the nested serpentine lines, such that each of a subset of the nested serpentine lines has at least three test pads, and each pair of consecutive test pads connected to one of the subset of the nested serpentine lines has a respectively different subset of the turn sections of that line connected therebetween.
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Abstract
A test vehicle (100) comprises a substrate (99), a plurality of nested serpentine lines (202) on the substrate, and a plurality of test pads (204) on the substrate. Each serpentine line has a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment. Each of the plurality of test pads is connected to a respective turn section of a respective one of the nested serpentine lines. Each pair of test pads connected to one of the subset of the nested serpentine lines has at least a respectively different turn section portion connected therebetween.
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Citations
28 Claims
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1. A test vehicle, comprising
a substrate; -
a plurality of nested serpentine conductive lines on the substrate, each serpentine line having a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment; and
a plurality of test pads on the substrate, each connected to a respective portion of a respective one of the nested serpentine lines, such that each of a subset of the nested serpentine lines has at least three test pads, and each pair of consecutive test pads connected to one of the subset of the nested serpentine lines has a respectively different subset of the turn sections of that line connected therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A test vehicle, comprising
a substrate; -
a plurality of nested serpentine conductive lines on the substrate, each serpentine line having a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment; and
a plurality of test pads on the substrate, each connected to a respective turn section of a respective one of the nested serpentine lines, wherein a subset of the test pads are positioned internally in the nest structure. - View Dependent Claims (13, 14, 15, 16)
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17. A test vehicle, comprising
a substrate; -
a plurality of nested serpentine conductive lines on the substrate, each serpentine line having a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment; and
a plurality of test pads on the substrate, each connected to a respective portion of a respective one of the nested serpentine lines, such that each of a subset of the nested serpentine lines has at least three test pads, and each pair of test pads connected to one of the subset of the nested serpentine lines has at least a respectively different turn section portion connected therebetween. - View Dependent Claims (18, 19, 20, 21)
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22. A method of testing, comprising the steps of:
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(a) fabricating a test vehicle having a plurality of nested serpentine lines;
(b) probing fractional portions of individual ones of the nested serpentine lines for short circuits or open circuits; and
(c) identifying a fractional portion of at least one of the nested serpentine lines that contains a defect based on the probing. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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Specification