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Semiconductor device and method of manufacturing the same

  • US 20050124105A1
  • Filed: 12/08/2004
  • Published: 06/09/2005
  • Est. Priority Date: 12/09/2003
  • Status: Abandoned Application
First Claim
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1. A semiconductor device provided with a semiconductor substrate, comprising:

  • an active element forming region for forming active elements;

    an element isolation region for isolating one element from another element;

    an underlayer film including nitrogen formed on a predetermined region on the element isolation region, the predetermined region extending from a border of the active element forming region to the element isolation region side; and

    a conductive film formed on the active element forming region and the underlayer film.

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