Sensor device for non-intrusive diagnosis of a semiconductor processing system
First Claim
1. An apparatus for providing information from within a processing system, the apparatus comprising:
- a support platform adapted for robotic transfer between a central transfer chamber and a substrate support structure in a vacuum processing chamber of the processing system; and
a device disposed on the support platform for obtaining a signal indicative of information obtained from within the processing system.
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Accused Products
Abstract
A sensor device, for diagnosing a processing system, generally includes a support platform and one or more sensors mounted on the support platform. The sensor senses a condition, such as direction or inclination or acceleration in one or two axes, of the sensor device and outputs a signal indicative thereof, which is then transferred to a device on or near the processing system. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.
45 Citations
20 Claims
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1. An apparatus for providing information from within a processing system, the apparatus comprising:
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a support platform adapted for robotic transfer between a central transfer chamber and a substrate support structure in a vacuum processing chamber of the processing system; and
a device disposed on the support platform for obtaining a signal indicative of information obtained from within the processing system. - View Dependent Claims (2, 3, 4)
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5. An apparatus for providing information from within a processing system, the apparatus comprising:
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a support platform adapted for robotic transfer between a central transfer chamber and a substrate support structure in a vacuum processing chamber of the processing system; and
a transmitter coupled to the support platform and adapted to broadcast a signal indicative of information obtained from within the processing system, wherein the transmitter is configured to transmit the signal. - View Dependent Claims (6, 7, 8)
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9. An apparatus for providing information from within a processing system, the apparatus comprising:
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a support platform adapted for robotic transport between a central transfer chamber and at least one processing chamber; and
a temperature sensor disposed on the support platform. - View Dependent Claims (10, 11, 12, 13)
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14. A method of providing information from within a processing system, the method comprising:
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attaching a device for obtaining information from within the processing system to a support platform adapted for robotic transfer between a central transfer chamber and a substrate support structure in a vacuum processing chamber of the processing system;
utilizing the device to collect information obtained from within the processing system; and
removing the device from the processing chamber. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification