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Sensor device for non-intrusive diagnosis of a semiconductor processing system

  • US 20050126315A1
  • Filed: 02/07/2005
  • Published: 06/16/2005
  • Est. Priority Date: 03/06/1998
  • Status: Abandoned Application
First Claim
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1. An apparatus for providing information from within a processing system, the apparatus comprising:

  • a support platform adapted for robotic transfer between a central transfer chamber and a substrate support structure in a vacuum processing chamber of the processing system; and

    a device disposed on the support platform for obtaining a signal indicative of information obtained from within the processing system.

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