Photoimaged channel plate for a switch, and method for making a switch using same

• US 20050126899A1
• Filed: 01/31/2005
• Published: 06/16/2005
• Est. Priority Date: 01/13/2003
• Status: Active Grant

• Current Assignee: John F. Casey, Marvin Glenn Wong
• Original Assignee: John F. Casey, Marvin Glenn Wong
• Inventors: Casey, John F., Wong, Marvin Glenn
• Granted Patent: US 7,098,413 B2
• Time in Patent Office: Days
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

Abstract

Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) depositing a photoimagable dielectric layer onto a substrate, 2) photoimaging at least one channel plate feature on the dielectric layer, and 3) developing the dielectric layer to form the at least one channel plate feature in the dielectric layer, thereby forming the channel plate. A method for making a switch with a photoimaged channel plate is also disclosed.

Claims

1. A method for making a switch, comprising:

a) depositing a photoimagable dielectric layer onto a substrate;

b) photoimaging at least one channel plate feature on the dielectric layer;

c) developing the dielectric layer to form the at least one channel plate feature in the dielectric layer, thereby forming a channel plate; and

d) aligning the at least one feature formed in the channel plate with at least one feature on a substrate and sealing at least a switching fluid between the channel plate and the substrate.

2. The method of claim 1, further comprising depositing at least one additional photoimagable dielectric layer on top of the existing dielectric layer, and repeating said photoimaging and developing actions for each of the additional dielectric layers.

3. The method of claim 2, wherein at least two different patterns of at least one channel plate feature are photoimaged in different ones of the existing and at least one additional dielectric layers.

4. The method of claim 2, wherein the at least one channel plate feature comprises a switching fluid channel, an actuating fluid channel, and a channel that connects the switching and actuating fluid channels.

5. The method of claim 1, further comprising grinding the dielectric layer to a desired thickness.

6. The method of claim 1, further comprising, after developing the dielectric layer, firing the dielectric layer.

7. The method of claim 6, further comprising depositing at least one additional photoimagable dielectric layer on top of the fired dielectric layer, and repeating said photoimaging and developing actions for each of the additional dielectric layers.

8. The method of claim 7, wherein at least two different patterns of at least one channel plate feature are photoimaged in different ones of the existing and at least one additional dielectric layers.

9. The method of claim 7, wherein the at least one channel plate feature comprises a switching fluid channel, an actuating fluid channel, and a channel that connects the switching and actuating fluid channels.

10. The method of claim 6, further comprising, after firing the dielectric layer, grinding the dielectric layer to a desired thickness.

11. A channel plate for a fluid-based switch, produced by:

a) depositing a photoimagable dielectric layer onto a substrate;

b) photoimaging at least one channel plate feature on the dielectric layer; and

c) developing the dielectric layer to form the at least one channel plate feature in the dielectric layer, thereby forming the channel plate.

12. The channel plate of claim 11, further comprising depositing at least one additional photoimagable dielectric layer on top of the existing dielectric layer, and repeating said photoimaging and developing actions for each of the additional dielectric layers.

13. The channel plate of claim 12, wherein at least two different patterns of at least one channel plate feature are photoimaged in different ones of the existing and at least one additional dielectric layers.

14. The channel plate of claim 12, wherein the at least one channel plate feature comprises a switching fluid channel, an actuating fluid channel, and a channel that connects the switching and actuating fluid channels.

15. The channel plate of claim 11, further comprising grinding the dielectric layer to a desired thickness.

16. The channel plate of claim 11, further comprising, after developing the dielectric layer, firing the dielectric layer.

17. The channel plate of claim 16, further comprising depositing at least one additional photoimagable dielectric layer on top of the fired dielectric layer, and repeating said photoimaging and developing actions for each of the additional dielectric layers.

18. The channel plate of claim 17, wherein at least two different patterns of at least one channel plate feature are photoimaged in different ones of the existing and at least one additional dielectric layers.

19. The channel plate of claim 17, wherein the at least one channel plate feature comprises a switching fluid channel, an actuating fluid channel, and a channel that connects the switching and actuating fluid channels.

20. The channel plate of claim 16, further comprising, after firing the dielectric layer, grinding the dielectric layer to a desired thickness.