Three-dimensional structures having feature sizes smaller than a minimum feature size and methods for fabricating

• US 20050126916A1
• Filed: 09/24/2004
• Published: 06/16/2005
• Est. Priority Date: 09/24/2003
• Status: Active Grant

• Current Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Smalley, Dennis R., Cohen, Adam L., Lockard, Michael S., Arat, Vacit
• Granted Patent: US 7,498,714 B2
• Time in Patent Office: Days
• US Class Current: 205/50
• CPC Class Codes: B33Y 70/00 Materials specially adapted for additive manufacturing
• CPC Class Codes: C25D 1/003 3D structures, e.g. superposed patterned layers
• CPC Class Codes: C25D 1/08 Perforated or foraminous objects, e.g. sieves C25D1/10 takes precedence
• CPC Class Codes: C25D 5/022 using masking means
• CPC Class Codes: C25D 5/10 Electroplating with more than one layer of the same or of different metals for bearings C25D7/10
• CPC Class Codes: C25D 5/623 Porosity of the layers
• CPC Class Codes: Y10T 137/86759 Reciprocating
• CPC Class Codes: Y10T 428/12361 having aperture or cut
• CPC Class Codes: Y10T 428/12479 Porous [e.g., foamed, spongy, cracked, etc.]
• CPC Class Codes: Y10T 428/19 Sheets or webs edge spliced or joined
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick
• CPC Class Codes: Y10T 428/249981 Plural void-containing components
• CPC Class Codes: Y10T 428/29 Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof

Abstract

Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures. In some embodiments, multi-layer structures include a first element (e.g. first patterned layer with a gap) and a second element (e.g. second patterned layer with a gap) positioned adjacent the first element to define a third element (e.g. a net gap or opening resulting from the combined gaps of the first and second elements) where the first and second elements have features that are sized at least as large as the minimum feature size and the third element, at least in part, has dimensions or defines dimensions smaller than the minimum feature size.

Claims

1. A layered three-dimensional structure having a minimum feature size, the layered three-dimensional structure comprising:

a first element; and

a second element positioned adjacent to the first element to define a third element positioned between the first element and the second element, wherein the third element is sized less than the minimum feature size.

2. The layered three-dimensional structure of claim 1, wherein the third element is a void.

3. The layered three-dimensional structure of claim 1, wherein the third element is a gap.

4. The layered three-dimensional structure of claim 2, wherein the first element comprises a material layer, and wherein the second element comprises a material layer.

5. The layered three-dimensional structure of claim 4, wherein the first element is positioned substantially along a first plane, wherein the second element is positioned substantially along a second plane, and wherein the first plane is substantially parallel and adjacent the second plane.

6. The layered three-dimensional structure of claim 2, wherein the first element comprises a layered structure, and wherein the second element comprises a layered structure.

7. The layered three-dimensional structure of claim 2, wherein the first element is capable of moving relative to the second element.

8. The layered three-dimensional structure of claim 1, wherein the third element is an opening.

9. The layered three-dimensional structure of claim 8, wherein the third element is a pore.

10. The layered three-dimensional structure of claim 8, wherein the first element abuts the second element.

11. The layered three-dimensional structure of claim 8, wherein the first element comprises a material layer, and wherein the second element comprises a material layer.

12. The layered three-dimensional structure of claim 11, wherein the second element is positioned upon the first element, so that the second element and the first element are in contact.

13. The layered three-dimensional structure of claim 8, wherein the first element comprises a layered structure, and wherein the second element comprises a layered structure.

14. The layered three-dimensional structure of claim 8, wherein the opening is capable of providing passage of at least one of a particle, a gas and a fluid.

15. A layered three-dimensional structure having a minimum feature size, the layered three-dimensional structure comprising:

a first layer defining a first opening, wherein the first opening is at least as large as the minimum feature size; and

a second layer positioned adjacent to the first layer, wherein the second layer defines a second opening at least as large as the minimum feature size, wherein the second opening is positioned adjacent the first opening to define a third opening between the first opening and the second opening, and wherein the third opening is capable of being sized less than the minimum feature size.

16. The layered three-dimensional structure of claim 15, wherein the third opening is sized less than the minimum feature size.

17. The layered three-dimensional structure of claim 15, wherein the second layer abuts the first layer.

18. The layered three-dimensional structure of claim 15, wherein the second opening abuts the first opening.

19. The layered three-dimensional structure of claim 18, wherein the second opening overlaps the first opening.

20. The layered three-dimensional structure of claim 18, wherein the first layer comprises at least one of gold, silver, nickel and copper.

21. The layered three-dimensional structure of claim 18, wherein the first layer comprises nickel.

22. The layered three-dimensional structure of claim 20, wherein the second layer comprises at least one of gold, silver, nickel and copper.

23. The layered three-dimensional structure of claim 21, wherein the second layer comprises nickel.

24. The layered three-dimensional structure of claim 18, wherein the first layer has a thickness between 1 μ

m and 20 μ

m, and wherein the second layer has a thickness between 1 μ

m and 20 μ

m.

25. The layered three-dimensional structure of claim 24, wherein the first layer is about 2 μ

m thick, and wherein the second layer is about 2 μ

m thick.

26. The layered three-dimensional structure of claim 15, wherein the first layer is positioned substantially along a first plane, wherein the second layer is positioned substantially along a second plane, and wherein the first plane is substantially parallel to the second plane.

27. The layered three-dimensional structure of claim 26, wherein the first plane is parallel to the second plane.

28. The layered three-dimensional structure of claim 15, wherein the first layer comprises a first fixed portion and a first movable portion positioned on the opposite side of the first opening from the first fixed portion, wherein the second layer comprises a second fixed portion and a second movable portion positioned on the opposite side of the second opening from the second fixed portion, wherein the second fixed portion abuts the first fixed portion to form a fixed element, wherein the second movable portion abuts the second movable portion to form a movable element, and wherein the movable element is capable of moving relative to the fixed element.

29. The layered three-dimensional structure of claim 28, wherein the layered three-dimensional structure is an actuator, wherein the fixed element is an electrode, and wherein the movable element is an electrode.

30. The layered three-dimensional structure of claim 29, wherein the actuator is at least one of a vertical comb actuator, horizontal comb actuator and a capacitance type actuator.

31. The layered three-dimensional structure of claim 30, wherein at least a portion of the fixed element is electrically conductive, wherein at least a portion of the movable element is electrically conductive, and wherein the three-dimensional structure is capable of applying an electrical differential between the fixed element and the movable element to provide an electrostatic force.

32. A layered three-dimensional structure having a minimum feature size, the layered three-dimensional structure comprising:

a first layer having a frame structure defining an array of first openings, wherein each first opening is at least as large as the minimum feature size; and

a second layer having a frame structure defining an array of second openings, wherein each second opening is at least as large as the minimum feature size, wherein the second layer is positioned at least adjacent to the first layer, wherein the array of second openings is positioned adjacent the array of first openings to define an array of third openings between the array of first openings and the array of second openings, and wherein each third opening is capable of being sized less than the minimum feature size.

33. The three-dimensional structure of claim 32, wherein at least one of the third openings are sized less than the minimum feature size.

34. The layered three-dimensional structure of claim 32, wherein the second layer is upon the first layer.

35. The layered three-dimensional structure of claim 32, wherein the second openings contact the first openings so that the second openings overlap the first openings.

36. The layered three-dimensional structure of claim 32 wherein the three-dimensional structure is a filter.

37. The layered three-dimensional structure of claim 36, wherein the third openings are pores in the filter.

38. The layered three-dimensional structure of claim 32, wherein the first layer comprises at least one of gold, silver, nickel and copper.

39. The layered three-dimensional structure of claim 32, wherein the first layer comprises nickel.

40. The layered three-dimensional structure of claim 38, wherein the second layer comprises at least one of gold, silver, nickel and copper.

41. The layered three-dimensional structure of claim 40, wherein the second layer comprises nickel.

42. The layered three-dimensional structure of claim 32, wherein the first layer has a thickness between 1 μ

m and 20 μ

m, and wherein the second layer has a thickness between 1 μ

m and 20 μ

m.

43. The layered three-dimensional structure of claim 42, wherein the first layer is about 2 μ

m thick, and wherein the second layer is about 2 μ

m thick.