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Hybrid film type sensor

  • US 20050126930A1
  • Filed: 11/12/2004
  • Published: 06/16/2005
  • Est. Priority Date: 11/19/1999
  • Status: Active Grant
First Claim
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1. A sensor cell for detecting gases comprising:

  • a substrate having a first surface and an opposite second surface;

    a sensing electrode;

    said sensing electrode in contact with said second surface;

    an opening extending from said first surface to said second surface proximate to said sensing electrode for controlling a gas flow; and

    a gas diffusion membrane in contact with and extending from said first surface to said sensing electrode.

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