Impedance transformation ratio control in film acoustically-coupled transformers
First Claim
1. A film acoustically-coupled transformer (FACT), comprising:
- decoupled stacked bulk acoustic resonators (DSBARs), each of the DSBARs comprising;
a lower film bulk acoustic resonator (FBAR) and an upper FBAR, the upper FBAR stacked on the lower FBAR, each FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, and an acoustic decoupler between the FBARs;
a first electrical circuit interconnecting the lower FBARs; and
a second electrical circuit interconnecting the upper FBARs;
in which;
the FBARs of one of the DSBARs differ in impedance from the FBARs of another of the DSBARs.
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Accused Products
Abstract
The film acoustically-coupled transformer (FACT) has decoupled stacked bulk acoustic resonators (DSBARs), a first electrical circuit and a second electrical circuit. Each of the DSBARs has a lower film bulk acoustic resonator (FBAR), an upper FBAR and an acoustic decoupler. The upper FBAR is stacked on the lower FBAR and the acoustic decoupler is located between the FBARs. Each FBAR has opposed planar electrodes and a piezoelectric element between the electrodes. The first electrical circuit interconnects the lower FBARs. The second electrical circuit interconnects the upper FBARs. The FBARs of one of the DSBARs differ in electrical impedance from the FBARs of another of the DSBARs. The FACT has an impedance transformation ratio greater than 1:m2, where m is the number of DSBARs. The actual impedance transformation ratio depends on the ratio of the impedances of the FBARs.
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Citations
27 Claims
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1. A film acoustically-coupled transformer (FACT), comprising:
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decoupled stacked bulk acoustic resonators (DSBARs), each of the DSBARs comprising;
a lower film bulk acoustic resonator (FBAR) and an upper FBAR, the upper FBAR stacked on the lower FBAR, each FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, and an acoustic decoupler between the FBARs;
a first electrical circuit interconnecting the lower FBARs; and
a second electrical circuit interconnecting the upper FBARs;
in which;
the FBARs of one of the DSBARs differ in impedance from the FBARs of another of the DSBARs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A film acoustically-coupled transformer (FACT), comprising:
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more than two decoupled stacked bulk acoustic resonators (DSBARs), each of the DSBARs comprising;
a first film bulk acoustic resonator (FBAR) and a second FBAR, one of the FBARs stacked on the other of the FBARs, each FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, and an acoustic decoupler between the FBARs;
a first electrical circuit interconnecting the first FBARs of the DSBARs; and
a second electrical circuit interconnecting the second FBARs of the DSBARs. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A film acoustically-coupled transformer (FACT), comprising:
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decoupled stacked bulk acoustic resonators (DSBARs), each of the DSBARs comprising;
a first film bulk acoustic resonator (FBAR) and a second FBAR, one of the FBARs stacked on the other of the FBARs, each FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, and an acoustic decoupler between the FBARs;
a first electrical circuit interconnecting the first FBARs; and
a second electrical circuit interconnecting the second FBARs;
in which;
the FACT has an impedance transformation ratio that differs from 1;
1 and 1;
m2, where m is the number of the DSBARs. - View Dependent Claims (26, 27)
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Specification