Micro-electromechanical drive mechanism arranged to effect rectilinear movement of working member

• US 20050128250A1
• Filed: 12/10/2004
• Published: 06/16/2005
• Est. Priority Date: 04/12/2002
• Status: Active Grant

• Current Assignee: Memjet Technology Ltd. (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Granted Patent: US 7,066,576 B2
• Time in Patent Office: Days
• US Class Current: 347/54
• CPC Class Codes: B41J 2/1412 Shape
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1601 Production of bubble jet print heads B41J2/1606, B41J2/162 take precedence
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2002/14435 Moving nozzle made of thermal bend detached actuator
• CPC Class Codes: B41J 2002/14475 characterised by nozzle shapes or number of orifices per chamber

Abstract

A micro-electromechanical drive mechanism is provided, comprising at least two elongate drive members and associated coupling structures coupled to a working member. The drive members each incorporate an electrical circuit in electrical contact with drive circuitry provided on a substrate, for receiving an electrical signal therefrom, and have a fixed end anchored to the substrate and a free end displaceable relative to the substrate on receipt of the electrical signal from the drive circuitry. The coupling structures are each fast with the free end of an associated drive member so as to be displaceable therewith. The working member is fast with and interposed between the coupling structures so as to be displaceable therewith. The drive members and associated coupling structures are configured so that the displacement of the free ends of the drive members is translated into substantially rectilinear movement of the working member.

Claims

2-1. A micro-electromechanical drive mechanism as claimed in claim 2, wherein each drive member is of a unitary structure and of a material having a Young'"'"'s modulus which is selected such that, when the active portion expands, the passive portion stores spring energy and when the active portion contracts, the spring energy is released.

3. A micro-electromechanical drive mechanism as claimed in claim 3, wherein each drive member has a transverse profile that is shaped so that part of a volume of one of the active portion and the passive portion is interposed between the other of the active portion and the passive portion and the substrate.