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Eccentricity measuring method and eccentricity measuring apparatus

  • US 20050128468A1
  • Filed: 11/09/2004
  • Published: 06/16/2005
  • Est. Priority Date: 11/28/2003
  • Status: Active Grant
First Claim
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1. An eccentricity measuring method, comprising:

  • projecting an index to an apparent spherical center position of at least one surface to be tested through an optical system;

    relatively moving the surface to be tested and the optical system based on a state of a reflection image of the index on the surface to be tested; and

    calculating an eccentric quantity of the surface to be tested from a relative movement quantity between the surface to be tested and the optical system.

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